JPS56111283A - Laser tube - Google Patents

Abstract

PURPOSE:To improve the straightness and finiching precision and increase thermal and mechanical strength by employing straight pipes for inside and outside glass pipes in the laser pipe of a gas flow type whose inside allows a gas for generating a laser to flow and whose outside has a jacket structure for cooling a plasma part. CONSTITUTION:The shapes of heat-resisting inside and outside glass pipes 10 and 11 constituting the laser pipe of gas flow type are left straight for employment with no application of processing. Between both end parts of these double glass pipes thus obtained an O ring 12 for preventing flow-out of cooling fluid 19 is provided, while to both end parts a cathode 13 is fitted through the intermediary of a base 15 and anode 14 through the intermediary of a base 16. Although only left half of the device is shown in the figure, a heat-resisting glass pipe 17 for connecting two anodes 14 in the central part is left to be a single pipe since it requires no cooling, and the gas 18 for generating the laser is made to flow only through the inside of the inside glass pipe 10.