JPS56105635A - Front surface illuminator for semiconductor wafer - Google Patents
Front surface illuminator for semiconductor waferInfo
- Publication number
- JPS56105635A JPS56105635A JP626081A JP626081A JPS56105635A JP S56105635 A JPS56105635 A JP S56105635A JP 626081 A JP626081 A JP 626081A JP 626081 A JP626081 A JP 626081A JP S56105635 A JPS56105635 A JP S56105635A
- Authority
- JP
- Japan
- Prior art keywords
- front surface
- semiconductor wafer
- surface illuminator
- illuminator
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11337580A | 1980-01-18 | 1980-01-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56105635A true JPS56105635A (en) | 1981-08-22 |
Family
ID=22349048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP626081A Pending JPS56105635A (en) | 1980-01-18 | 1981-01-19 | Front surface illuminator for semiconductor wafer |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0032716A3 (ja) |
JP (1) | JPS56105635A (ja) |
CA (1) | CA1156074A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6323317A (ja) * | 1987-04-13 | 1988-01-30 | Canon Inc | 投影露光装置 |
JPS6323318A (ja) * | 1987-04-13 | 1988-01-30 | Canon Inc | 投影露光装置 |
JPH07183216A (ja) * | 1994-11-28 | 1995-07-21 | Hitachi Ltd | 投影露光におけるウエーハの位置合せ方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3610750A (en) * | 1968-11-25 | 1971-10-05 | Teledyne Inc | Methods and apparatus for photo-optical manufacture of semiconductor products |
JPS5117297B1 (ja) * | 1971-03-11 | 1976-06-01 | ||
US4068947A (en) * | 1973-03-09 | 1978-01-17 | The Perkin-Elmer Corporation | Optical projection and scanning apparatus |
US3963353A (en) * | 1974-09-26 | 1976-06-15 | The Perkin-Elmer Corporation | Monolithic beam splitter mirror arrangement |
EP0111661A3 (en) * | 1979-04-03 | 1984-09-26 | Eaton-Optimetrix Inc. | Photometric printing apparatus |
-
1981
- 1981-01-14 EP EP81100206A patent/EP0032716A3/en not_active Withdrawn
- 1981-01-16 CA CA000368719A patent/CA1156074A/en not_active Expired
- 1981-01-19 JP JP626081A patent/JPS56105635A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6323317A (ja) * | 1987-04-13 | 1988-01-30 | Canon Inc | 投影露光装置 |
JPS6323318A (ja) * | 1987-04-13 | 1988-01-30 | Canon Inc | 投影露光装置 |
JPH0142129B2 (ja) * | 1987-04-13 | 1989-09-11 | Canon Kk | |
JPH0142130B2 (ja) * | 1987-04-13 | 1989-09-11 | Canon Kk | |
JPH07183216A (ja) * | 1994-11-28 | 1995-07-21 | Hitachi Ltd | 投影露光におけるウエーハの位置合せ方法 |
Also Published As
Publication number | Publication date |
---|---|
CA1156074A (en) | 1983-11-01 |
EP0032716A3 (en) | 1982-09-01 |
EP0032716A2 (en) | 1981-07-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2075921B (en) | Processing semiconductor wafers | |
DE3379297D1 (en) | Substrate for semiconductor apparatus | |
GB2075752B (en) | Semiconductor integrated circuits | |
GB2099951B (en) | Apparatus for cleaning semiconductor wafers | |
IE810907L (en) | Grinding semiconductor wafers | |
JPS56126961A (en) | Semiconductor device | |
JPS56105662A (en) | Semiconductor device | |
JPS57180141A (en) | Device for aligning wafers | |
EP0033159A3 (en) | Semiconductor device | |
JPS56114370A (en) | Semiconductor device | |
GB8403595D0 (en) | Semiconductor device | |
JPS56126966A (en) | Semiconductor device | |
EP0055558A3 (en) | Semiconductor device | |
DE3276402D1 (en) | Wafer surface contouring device | |
GB8329071D0 (en) | Semiconductor | |
JPS57198643A (en) | Semiconductor substrate | |
DE3166929D1 (en) | Semiconductor device | |
GB2149575B (en) | Semiconductor device | |
DE3175373D1 (en) | Semiconductor device | |
EP0048358A3 (en) | Semiconductor device | |
GB2115923B (en) | Semiconductor wafer alignment | |
DE3162083D1 (en) | Semiconductor device | |
DE3174500D1 (en) | Semiconductor device | |
DE3174789D1 (en) | Semiconductor device | |
DE3175783D1 (en) | Semiconductor device |