JPS56103354A - Emission spectroscopic analysis apparatus - Google Patents

Emission spectroscopic analysis apparatus

Info

Publication number
JPS56103354A
JPS56103354A JP574380A JP574380A JPS56103354A JP S56103354 A JPS56103354 A JP S56103354A JP 574380 A JP574380 A JP 574380A JP 574380 A JP574380 A JP 574380A JP S56103354 A JPS56103354 A JP S56103354A
Authority
JP
Japan
Prior art keywords
plasma
torch
sample
gas
generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP574380A
Other languages
Japanese (ja)
Inventor
Yuzuru Komiyama
Yutaka Hiratsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP574380A priority Critical patent/JPS56103354A/en
Publication of JPS56103354A publication Critical patent/JPS56103354A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/73Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

PURPOSE:To improve sensitivity and accuracy by transferring the vapor generated from sample surface by laser by means of a high-purity gas. CONSTITUTION:A gas inlet part 4 and a torch 9 are provided to a sampling part 6, and said part is passed through a waveguide 10 connected to a microwave power source 8. A spectral part 13 is disposed to the torch 9 via a photometric condensing system 12. The leser light 11 from a laser oscillator 2 is irradiated to the sample on a sample table 7, and the vapor generated is introduced into the torch 9 by the high-prity gas from the gas inlet part 4, so that it is allowed to collide against the previously introduced high-purity gas having been activated to plasma flame by the microwave of the waveguide 10, whereby plasma cloud 18 of the generated steam is formed. The light generated by the transition from this plasma excitation state to a ground state or metastable state is divided by the spectral part 13 and is detected with a detecting part 14. Thereby, the diffusion of the stained sample measuring surface by the electrode at the auxiliary exciting of the atom vapor generated from the same surface and the mingling of the atom vapor and the plasma state are eliminated and the measurement of high sensitivity and high accuracy is made possible.
JP574380A 1980-01-23 1980-01-23 Emission spectroscopic analysis apparatus Pending JPS56103354A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP574380A JPS56103354A (en) 1980-01-23 1980-01-23 Emission spectroscopic analysis apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP574380A JPS56103354A (en) 1980-01-23 1980-01-23 Emission spectroscopic analysis apparatus

Publications (1)

Publication Number Publication Date
JPS56103354A true JPS56103354A (en) 1981-08-18

Family

ID=11619578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP574380A Pending JPS56103354A (en) 1980-01-23 1980-01-23 Emission spectroscopic analysis apparatus

Country Status (1)

Country Link
JP (1) JPS56103354A (en)

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