JPS5599058A - Humidity detecting element - Google Patents

Humidity detecting element

Info

Publication number
JPS5599058A
JPS5599058A JP776979A JP776979A JPS5599058A JP S5599058 A JPS5599058 A JP S5599058A JP 776979 A JP776979 A JP 776979A JP 776979 A JP776979 A JP 776979A JP S5599058 A JPS5599058 A JP S5599058A
Authority
JP
Japan
Prior art keywords
oxide film
humidity
anode
coupling agent
silane coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP776979A
Other languages
Japanese (ja)
Other versions
JPS6133372B2 (en
Inventor
Osakuni Ogino
Atsushi Nishino
Akihiko Yoshida
Toshiyuki Yasufuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP776979A priority Critical patent/JPS5599058A/en
Publication of JPS5599058A publication Critical patent/JPS5599058A/en
Publication of JPS6133372B2 publication Critical patent/JPS6133372B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Non-Adjustable Resistors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To provide a compacted humidity detecting element with a high accuracy and a high responsiveness at a low cost by laminating a semiconductive metal oxide layer, a carbon layer and a cathode current collecting layer employing a condictive paste with added silane coupling agent in sequence on a humidity sensitive film of dielectric anode oxide film.
CONSTITUTION: A dierectric anode oxide film 2 is formed on the surface of a metal body 1 made of Ta, Ti and Al or the like by the anode oxidization or the like and superlaid with a semiconductive metal oxide film 3 having a contact section 5 and a non-contact space section 4. A carbon layer 6 and a cathode current collecting layer 7 employing a conductive paste added to by a silane coupling agent are formed on the surface thereof. Water in the air is absorbed by the humidity absorbing semiconductive metal oxide film 3 reaching the dielectric anode oxide film 2 to measure. The use of the conductive paste added to by a silane coupling agent for the anode current collecting layer 7 can prevent the secular deterioration in the performance of the dielement. Thus, a humidity detecting element having a long, stable humidity characteristics can be obtained.
COPYRIGHT: (C)1980,JPO&Japio
JP776979A 1979-01-25 1979-01-25 Humidity detecting element Granted JPS5599058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP776979A JPS5599058A (en) 1979-01-25 1979-01-25 Humidity detecting element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP776979A JPS5599058A (en) 1979-01-25 1979-01-25 Humidity detecting element

Publications (2)

Publication Number Publication Date
JPS5599058A true JPS5599058A (en) 1980-07-28
JPS6133372B2 JPS6133372B2 (en) 1986-08-01

Family

ID=11674880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP776979A Granted JPS5599058A (en) 1979-01-25 1979-01-25 Humidity detecting element

Country Status (1)

Country Link
JP (1) JPS5599058A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4558393A (en) * 1983-04-28 1985-12-10 Sharp Kabushiki Kaisha Moisture sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018894A (en) * 1973-06-18 1975-02-27
JPS5254674U (en) * 1975-10-17 1977-04-20
JPS5315589A (en) * 1976-07-28 1978-02-13 Tokushiyu Muki Zairiyou Kenkiy Paste for thickkfilm circuit resistor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018894A (en) * 1973-06-18 1975-02-27
JPS5254674U (en) * 1975-10-17 1977-04-20
JPS5315589A (en) * 1976-07-28 1978-02-13 Tokushiyu Muki Zairiyou Kenkiy Paste for thickkfilm circuit resistor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4558393A (en) * 1983-04-28 1985-12-10 Sharp Kabushiki Kaisha Moisture sensor

Also Published As

Publication number Publication date
JPS6133372B2 (en) 1986-08-01

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