JPS5586048A - Magnetron discharge device - Google Patents
Magnetron discharge deviceInfo
- Publication number
- JPS5586048A JPS5586048A JP16034878A JP16034878A JPS5586048A JP S5586048 A JPS5586048 A JP S5586048A JP 16034878 A JP16034878 A JP 16034878A JP 16034878 A JP16034878 A JP 16034878A JP S5586048 A JPS5586048 A JP S5586048A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- cathode
- magnetron discharge
- plate sections
- central
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To stably keep a magnetron discharge in a magnetic-field which changes its direction and strength, and perform the magnetron discharge which will not be influenced by magnetic-field variation of discharge current.
CONSTITUTION: The anode 1 is thin and circular. The distance from its symmetical axis, i.e. the length in which its radius is minimized is some 0.5.mm. The cathode plate section 12 is located, inserting the anode 1. DC high voltage is applied between the electrode plate sections 12 and the anode 1 from the DC high voltage power supply 4. The central cathode is located at the center of the anode 1 in the same way as the central cathode 2a. The central electrode 11 is electrically insulated from the cathode plate sections 12. Negative voltage is applied to the cathode plate sections 12 from the DC power supply 9.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16034878A JPS5586048A (en) | 1978-12-23 | 1978-12-23 | Magnetron discharge device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16034878A JPS5586048A (en) | 1978-12-23 | 1978-12-23 | Magnetron discharge device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5586048A true JPS5586048A (en) | 1980-06-28 |
Family
ID=15713032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16034878A Pending JPS5586048A (en) | 1978-12-23 | 1978-12-23 | Magnetron discharge device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5586048A (en) |
-
1978
- 1978-12-23 JP JP16034878A patent/JPS5586048A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS55161341A (en) | Microwave ion source | |
ES2002447A6 (en) | Simplified gaseous discharge device simmering circuit. | |
JPS52127168A (en) | Etching unit | |
JPS6489242A (en) | Electrode for discharge light source | |
JPS5586048A (en) | Magnetron discharge device | |
JPS5249985A (en) | Duplicate electrode | |
JPS5638766A (en) | Hollow-cathode discharge-tube | |
JPS5457859A (en) | Ion source | |
JPS57126999A (en) | Electrolytic treatment of strip like metal plate | |
JPS5711447A (en) | Hollow cathode discharge device | |
JPS535577A (en) | Ignition property measurement method for controllable semiconductor device | |
JPS54140893A (en) | Laser unit | |
JPS5374397A (en) | Lateral exciting laser oscillator | |
JPS64698A (en) | Plasma x-ray source | |
SU1364192A1 (en) | Trigatron discharger | |
JPS5611332A (en) | Hot-cathode ionization vacuum gauge | |
JPS5648042A (en) | X-ray tube | |
JPS54136191A (en) | Ion laser device | |
JPS5279690A (en) | Electromic display cell | |
JPS5775136A (en) | Ion generator | |
JPS6483699A (en) | Method for electropolishing inner surface of relatively small vessel with coiled electrode | |
JPS5647574A (en) | Plasma etching apparatus | |
SU1494835A1 (en) | Accelerator of ions of metals | |
JPS5538946A (en) | Sputtering apparatus | |
JPS6482432A (en) | Electron beam generator |