JPS5578224A - Temperature sensor - Google Patents
Temperature sensorInfo
- Publication number
- JPS5578224A JPS5578224A JP15242178A JP15242178A JPS5578224A JP S5578224 A JPS5578224 A JP S5578224A JP 15242178 A JP15242178 A JP 15242178A JP 15242178 A JP15242178 A JP 15242178A JP S5578224 A JPS5578224 A JP S5578224A
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- sensing layer
- heat sensing
- contact
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Thermistors And Varistors (AREA)
Abstract
PURPOSE: To enable the application with quick thermal response and high sensitivity and over a wide variety with high accuracy and to decrease the time aging at high temperature, by providing the contact layer having thermal conduction and wearing properties and the heat sensing layer on the elastic piece, in the temperature mearsuring sensor of mobile body such as rotating body.
CONSTITUTION: The insulation film 2 such as silicon oxide is formed on the surface of one end of the spring material 1 such as phosphor bronze under Ar/O2 mixed gas atmosphere with the sputtering method taking silicon carbide. Next, the sputtering atmosphere is changed into only inactive gas to form the heat sensing layer 3 having thermister characteristics consisting only of the silicon carbide. Next, the electrodes 4, 4' of Au, Pt are provided on the surface of the heat sensing layer 3 and the leads 5, 5' are with the one end. Further, the silicon oxide insulation film 6 and the contact film 7 in contact with the measured body made of silicon carbide are made with the said procedure to constitute the temperature sensor.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15242178A JPS5578224A (en) | 1978-12-07 | 1978-12-07 | Temperature sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15242178A JPS5578224A (en) | 1978-12-07 | 1978-12-07 | Temperature sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5578224A true JPS5578224A (en) | 1980-06-12 |
Family
ID=15540138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15242178A Pending JPS5578224A (en) | 1978-12-07 | 1978-12-07 | Temperature sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5578224A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03156331A (en) * | 1989-08-21 | 1991-07-04 | Nkk Corp | Temperature sensor |
US5281793A (en) * | 1991-10-28 | 1994-01-25 | Xerox Corporation | Apparatus for positioning a temperature sensing element in temperature sensing relationship with a moving object |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49103686A (en) * | 1973-02-02 | 1974-10-01 |
-
1978
- 1978-12-07 JP JP15242178A patent/JPS5578224A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49103686A (en) * | 1973-02-02 | 1974-10-01 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03156331A (en) * | 1989-08-21 | 1991-07-04 | Nkk Corp | Temperature sensor |
US5281793A (en) * | 1991-10-28 | 1994-01-25 | Xerox Corporation | Apparatus for positioning a temperature sensing element in temperature sensing relationship with a moving object |
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