JPS5578224A - Temperature sensor - Google Patents

Temperature sensor

Info

Publication number
JPS5578224A
JPS5578224A JP15242178A JP15242178A JPS5578224A JP S5578224 A JPS5578224 A JP S5578224A JP 15242178 A JP15242178 A JP 15242178A JP 15242178 A JP15242178 A JP 15242178A JP S5578224 A JPS5578224 A JP S5578224A
Authority
JP
Japan
Prior art keywords
silicon carbide
sensing layer
heat sensing
contact
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15242178A
Other languages
Japanese (ja)
Inventor
Masao Kasahara
Kiyotaka Wasa
Tsuneo Mitsuyu
Kenzo Ochi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15242178A priority Critical patent/JPS5578224A/en
Publication of JPS5578224A publication Critical patent/JPS5578224A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Thermistors And Varistors (AREA)

Abstract

PURPOSE: To enable the application with quick thermal response and high sensitivity and over a wide variety with high accuracy and to decrease the time aging at high temperature, by providing the contact layer having thermal conduction and wearing properties and the heat sensing layer on the elastic piece, in the temperature mearsuring sensor of mobile body such as rotating body.
CONSTITUTION: The insulation film 2 such as silicon oxide is formed on the surface of one end of the spring material 1 such as phosphor bronze under Ar/O2 mixed gas atmosphere with the sputtering method taking silicon carbide. Next, the sputtering atmosphere is changed into only inactive gas to form the heat sensing layer 3 having thermister characteristics consisting only of the silicon carbide. Next, the electrodes 4, 4' of Au, Pt are provided on the surface of the heat sensing layer 3 and the leads 5, 5' are with the one end. Further, the silicon oxide insulation film 6 and the contact film 7 in contact with the measured body made of silicon carbide are made with the said procedure to constitute the temperature sensor.
COPYRIGHT: (C)1980,JPO&Japio
JP15242178A 1978-12-07 1978-12-07 Temperature sensor Pending JPS5578224A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15242178A JPS5578224A (en) 1978-12-07 1978-12-07 Temperature sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15242178A JPS5578224A (en) 1978-12-07 1978-12-07 Temperature sensor

Publications (1)

Publication Number Publication Date
JPS5578224A true JPS5578224A (en) 1980-06-12

Family

ID=15540138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15242178A Pending JPS5578224A (en) 1978-12-07 1978-12-07 Temperature sensor

Country Status (1)

Country Link
JP (1) JPS5578224A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03156331A (en) * 1989-08-21 1991-07-04 Nkk Corp Temperature sensor
US5281793A (en) * 1991-10-28 1994-01-25 Xerox Corporation Apparatus for positioning a temperature sensing element in temperature sensing relationship with a moving object

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49103686A (en) * 1973-02-02 1974-10-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49103686A (en) * 1973-02-02 1974-10-01

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03156331A (en) * 1989-08-21 1991-07-04 Nkk Corp Temperature sensor
US5281793A (en) * 1991-10-28 1994-01-25 Xerox Corporation Apparatus for positioning a temperature sensing element in temperature sensing relationship with a moving object

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