JPS6416956A - Humidity sensing element - Google Patents
Humidity sensing elementInfo
- Publication number
- JPS6416956A JPS6416956A JP17329387A JP17329387A JPS6416956A JP S6416956 A JPS6416956 A JP S6416956A JP 17329387 A JP17329387 A JP 17329387A JP 17329387 A JP17329387 A JP 17329387A JP S6416956 A JPS6416956 A JP S6416956A
- Authority
- JP
- Japan
- Prior art keywords
- sensing film
- insulating layer
- substrate
- film
- bridge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE:To realize high detection sensitivity, fast response, operation with low power consumption, etc., by forming a bridge, etc., of two layers, i.e. an insulating layer and a sensing film. CONSTITUTION:The thin film insulating layer 2 and sensing film 4 are formed in a bridge shape on a substrate 1 and then the crystal-axial anisotropic etching of Si of the substrate 1 is carried out to form a hollow structure between the substrate 1 and sensing film/insulating layer bridge part 3 by etching under the bridge part 3, thereby obtaining excellent mechanical strength and superior heat insulation. Further, an electrode 5 is formed on the sensing film 4 and used for the self-heating or electric resistance evaluation of the film. Thus, the high-sensitivity detection, fast response, operation with low power consumption, etc., are realized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17329387A JPS6416956A (en) | 1987-07-10 | 1987-07-10 | Humidity sensing element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17329387A JPS6416956A (en) | 1987-07-10 | 1987-07-10 | Humidity sensing element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6416956A true JPS6416956A (en) | 1989-01-20 |
Family
ID=15957759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17329387A Pending JPS6416956A (en) | 1987-07-10 | 1987-07-10 | Humidity sensing element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6416956A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003516539A (en) * | 1999-12-08 | 2003-05-13 | ゼンジリオン アクチエンゲゼルシャフト | Capacitive sensor |
US8633047B2 (en) | 2011-09-02 | 2014-01-21 | Sensirion Ag | Method for manufacturing a sensor chip |
-
1987
- 1987-07-10 JP JP17329387A patent/JPS6416956A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003516539A (en) * | 1999-12-08 | 2003-05-13 | ゼンジリオン アクチエンゲゼルシャフト | Capacitive sensor |
US8633047B2 (en) | 2011-09-02 | 2014-01-21 | Sensirion Ag | Method for manufacturing a sensor chip |
US9140740B2 (en) | 2011-09-02 | 2015-09-22 | Sensirion Ag | Sensor chip and method for manufacturing a sensor chip |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5395097A (en) | Gas-sensitive element | |
JPS5477081A (en) | Semiconductor device and production of the same | |
JPS6488128A (en) | Temperature sensor | |
CA2011659A1 (en) | Measuring sensor for fluid state determination and method for measurement using such sensor | |
JPS6416956A (en) | Humidity sensing element | |
JPS60196659A (en) | Resistance measuring electrode for sensor | |
EP0241874A3 (en) | Device including a temperature sensor | |
JPS5775438A (en) | Semiconductor element | |
JPH0720080A (en) | Humidity sensor | |
JPS6432127A (en) | Support for infrared detecting element | |
JP2000116627A5 (en) | ||
JPS568537A (en) | Flammable gas detecting element | |
JPS5616876A (en) | Effective value detecting element | |
JPS5677730A (en) | Pyroelectric infrared-ray detector | |
CN218212746U (en) | Two-way three-dimensional heating type humidity sensor and equipment with humidity acquisition function | |
JPS6474440A (en) | Raindrop detecting device | |
JPS6421347A (en) | Enzyme sensor and manufacture thereof | |
JPS5689051A (en) | Detection of air-fuel ratio | |
JPS57139651A (en) | Humidity sensor | |
JPS5629130A (en) | Temperature sensor | |
JPS56104241A (en) | Gas sensing element | |
JPS52141257A (en) | Sonde for detecting charged stacking layer thickness | |
JPH0749811Y2 (en) | Infrared sensor | |
CN115308274A (en) | Two-way three-dimensional heating type humidity sensor and equipment with humidity acquisition function | |
SU1550395A1 (en) | Heating electrolytic converter of gas humidity |