JPS5576561A - Scanning type electron microscope - Google Patents

Scanning type electron microscope

Info

Publication number
JPS5576561A
JPS5576561A JP15007678A JP15007678A JPS5576561A JP S5576561 A JPS5576561 A JP S5576561A JP 15007678 A JP15007678 A JP 15007678A JP 15007678 A JP15007678 A JP 15007678A JP S5576561 A JPS5576561 A JP S5576561A
Authority
JP
Japan
Prior art keywords
ratio
operating distance
whole number
multiplying
attenuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15007678A
Other languages
Japanese (ja)
Inventor
Osamu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15007678A priority Critical patent/JPS5576561A/en
Publication of JPS5576561A publication Critical patent/JPS5576561A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain the whole number of the variation ratio when operating distance is varied in inserting an amplifier or attenuator having a gain which equals to the product of operating distance ratio and a reciprocal number of a whole number close to the ratio into an electron beam deflecting power source.
CONSTITUTION: When operating distance is changed from l2Wl1 while keeping the amplification factor of the amplifier/attenuator 8 at 1, the multiplying ratio at both positions becomes RM=M1/M2=l2/l1. When l2/l1 is not whole number , the multiplying ratio RM is not whole number naturally. Thus, the amplification factor of the amplifier/attenuator 8 is switched by the operating distance switch 9 so that it becmoes 1 when the operating distance is l2 and becomes CM=l2/l1 when the operating distance is l1 N and N becomes a whole number close to l2/l1. With such a system, low multiplying ratio can be easily obtained by longer operating distances and also correction for displaying value ot the multiplying ratio displayer can be simplified. In addition, clear multiplying ratio values can be obtained consistently without the multiplying ratio being varied continuously.
COPYRIGHT: (C)1980,JPO&Japio
JP15007678A 1978-12-06 1978-12-06 Scanning type electron microscope Pending JPS5576561A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15007678A JPS5576561A (en) 1978-12-06 1978-12-06 Scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15007678A JPS5576561A (en) 1978-12-06 1978-12-06 Scanning type electron microscope

Publications (1)

Publication Number Publication Date
JPS5576561A true JPS5576561A (en) 1980-06-09

Family

ID=15488985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15007678A Pending JPS5576561A (en) 1978-12-06 1978-12-06 Scanning type electron microscope

Country Status (1)

Country Link
JP (1) JPS5576561A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573008A (en) * 1982-09-24 1986-02-25 Siemens Aktiengesellschaft Method for the contact-free testing of microcircuits or the like with a particle beam probe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573008A (en) * 1982-09-24 1986-02-25 Siemens Aktiengesellschaft Method for the contact-free testing of microcircuits or the like with a particle beam probe

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