JPS5576561A - Scanning type electron microscope - Google Patents
Scanning type electron microscopeInfo
- Publication number
- JPS5576561A JPS5576561A JP15007678A JP15007678A JPS5576561A JP S5576561 A JPS5576561 A JP S5576561A JP 15007678 A JP15007678 A JP 15007678A JP 15007678 A JP15007678 A JP 15007678A JP S5576561 A JPS5576561 A JP S5576561A
- Authority
- JP
- Japan
- Prior art keywords
- ratio
- operating distance
- whole number
- multiplying
- attenuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain the whole number of the variation ratio when operating distance is varied in inserting an amplifier or attenuator having a gain which equals to the product of operating distance ratio and a reciprocal number of a whole number close to the ratio into an electron beam deflecting power source.
CONSTITUTION: When operating distance is changed from l2Wl1 while keeping the amplification factor of the amplifier/attenuator 8 at 1, the multiplying ratio at both positions becomes RM=M1/M2=l2/l1. When l2/l1 is not whole number , the multiplying ratio RM is not whole number naturally. Thus, the amplification factor of the amplifier/attenuator 8 is switched by the operating distance switch 9 so that it becmoes 1 when the operating distance is l2 and becomes CM=l2/l1 when the operating distance is l1 N and N becomes a whole number close to l2/l1. With such a system, low multiplying ratio can be easily obtained by longer operating distances and also correction for displaying value ot the multiplying ratio displayer can be simplified. In addition, clear multiplying ratio values can be obtained consistently without the multiplying ratio being varied continuously.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15007678A JPS5576561A (en) | 1978-12-06 | 1978-12-06 | Scanning type electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15007678A JPS5576561A (en) | 1978-12-06 | 1978-12-06 | Scanning type electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5576561A true JPS5576561A (en) | 1980-06-09 |
Family
ID=15488985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15007678A Pending JPS5576561A (en) | 1978-12-06 | 1978-12-06 | Scanning type electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5576561A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4573008A (en) * | 1982-09-24 | 1986-02-25 | Siemens Aktiengesellschaft | Method for the contact-free testing of microcircuits or the like with a particle beam probe |
-
1978
- 1978-12-06 JP JP15007678A patent/JPS5576561A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4573008A (en) * | 1982-09-24 | 1986-02-25 | Siemens Aktiengesellschaft | Method for the contact-free testing of microcircuits or the like with a particle beam probe |
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