JPS522381A - Electronics beam deflection scanning method - Google Patents
Electronics beam deflection scanning methodInfo
- Publication number
- JPS522381A JPS522381A JP50077987A JP7798775A JPS522381A JP S522381 A JPS522381 A JP S522381A JP 50077987 A JP50077987 A JP 50077987A JP 7798775 A JP7798775 A JP 7798775A JP S522381 A JPS522381 A JP S522381A
- Authority
- JP
- Japan
- Prior art keywords
- scanning method
- beam deflection
- deflection scanning
- electronics beam
- electronics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To attain to possibility of electronics beam scanning in a wide range with high accuracy and without deterioration of analyzing capability by controlling it by providing a beam deflecting devices in front and in the rear of a mask board.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50077987A JPS522381A (en) | 1975-06-24 | 1975-06-24 | Electronics beam deflection scanning method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50077987A JPS522381A (en) | 1975-06-24 | 1975-06-24 | Electronics beam deflection scanning method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS522381A true JPS522381A (en) | 1977-01-10 |
JPS5530651B2 JPS5530651B2 (en) | 1980-08-12 |
Family
ID=13649192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50077987A Granted JPS522381A (en) | 1975-06-24 | 1975-06-24 | Electronics beam deflection scanning method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS522381A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5435173U (en) * | 1977-08-12 | 1979-03-07 | ||
JPS54130448A (en) * | 1978-03-31 | 1979-10-09 | Umebachi Fuasunaa Kk | Method and apparatus for phosphate treatment of eleongated material |
-
1975
- 1975-06-24 JP JP50077987A patent/JPS522381A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5435173U (en) * | 1977-08-12 | 1979-03-07 | ||
JPS54130448A (en) * | 1978-03-31 | 1979-10-09 | Umebachi Fuasunaa Kk | Method and apparatus for phosphate treatment of eleongated material |
Also Published As
Publication number | Publication date |
---|---|
JPS5530651B2 (en) | 1980-08-12 |
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