JPS5550213A - Optical instrument - Google Patents
Optical instrumentInfo
- Publication number
- JPS5550213A JPS5550213A JP12331479A JP12331479A JPS5550213A JP S5550213 A JPS5550213 A JP S5550213A JP 12331479 A JP12331479 A JP 12331479A JP 12331479 A JP12331479 A JP 12331479A JP S5550213 A JPS5550213 A JP S5550213A
- Authority
- JP
- Japan
- Prior art keywords
- optical instrument
- instrument
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1066—Beam splitting or combining systems for enhancing image performance, like resolution, pixel numbers, dual magnifications or dynamic range, by tiling, slicing or overlapping fields of view
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/19—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays
- H04N1/191—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays the array comprising a one-dimensional array, or a combination of one-dimensional arrays, or a substantially one-dimensional array, e.g. an array of staggered elements
- H04N1/192—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line
- H04N1/193—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line using electrically scanned linear arrays, e.g. linear CCD arrays
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/19—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays
- H04N1/191—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays the array comprising a one-dimensional array, or a combination of one-dimensional arrays, or a substantially one-dimensional array, e.g. an array of staggered elements
- H04N1/192—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line
- H04N1/193—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line using electrically scanned linear arrays, e.g. linear CCD arrays
- H04N1/1934—Combination of arrays
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/19—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays
- H04N1/191—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using multi-element arrays the array comprising a one-dimensional array, or a combination of one-dimensional arrays, or a substantially one-dimensional array, e.g. an array of staggered elements
- H04N1/192—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line
- H04N1/193—Simultaneously or substantially simultaneously scanning picture elements on one main scanning line using electrically scanned linear arrays, e.g. linear CCD arrays
- H04N1/1935—Optical means for mapping the whole or part of a scanned line onto the array
- H04N1/1937—Optical means for mapping the whole or part of a scanned line onto the array using a reflecting element, e.g. a mirror or a prism
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Facsimile Scanning Arrangements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/949,179 US4272684A (en) | 1978-10-06 | 1978-10-06 | Optical beam-splitting arrangements on object side of a lens |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5550213A true JPS5550213A (en) | 1980-04-11 |
Family
ID=25488702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12331479A Pending JPS5550213A (en) | 1978-10-06 | 1979-09-27 | Optical instrument |
Country Status (4)
Country | Link |
---|---|
US (1) | US4272684A (ja) |
EP (1) | EP0009983A1 (ja) |
JP (1) | JPS5550213A (ja) |
CA (1) | CA1116907A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5955674A (ja) * | 1982-09-24 | 1984-03-30 | Canon Inc | カラ−原稿読取り装置 |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4385325A (en) * | 1980-04-17 | 1983-05-24 | Xerox Corporation | Raster input scanner comprising two CCD arrays |
CA1165159A (en) * | 1980-05-22 | 1984-04-10 | Duane E. Grant | Mirror multiplexor for linear image sensors |
US4432017A (en) * | 1981-07-20 | 1984-02-14 | Xerox Corporation | Adjacent bilinear photosite imager |
US4712137A (en) * | 1981-07-20 | 1987-12-08 | Xerox Corporation | High density CCD imager |
JPS5851385A (ja) * | 1981-09-24 | 1983-03-26 | Hitachi Ltd | 光電変換装置 |
US4533828A (en) * | 1982-12-03 | 1985-08-06 | Robotic Vision Systems, Inc. | Arrangement for increasing the dynamic range of optical inspection devices to accommodate varying surface reflectivity characteristics |
JPS60143311A (ja) * | 1983-12-29 | 1985-07-29 | Asahi Optical Co Ltd | Ttlオ−トフオ−カスビデオカメラの光学系 |
JPS60247369A (ja) * | 1984-05-23 | 1985-12-07 | Dainippon Screen Mfg Co Ltd | アレイセンサ解像度増加方法および装置 |
SE455646B (sv) * | 1984-10-22 | 1988-07-25 | Radians Innova Ab | Fluorescensanordning |
JPS61141466A (ja) * | 1984-12-14 | 1986-06-28 | Toshiba Corp | 画像情報読取装置 |
US4634882A (en) * | 1985-02-19 | 1987-01-06 | Karmar Research Partnership | Optical device for displaying a large two dimensional image |
FR2581251B1 (fr) * | 1985-04-30 | 1987-09-11 | Thomson Csf | Dispositif d'aboutement optique de detecteurs photosensibles |
JPH0614658B2 (ja) * | 1985-08-20 | 1994-02-23 | 大日本スクリ−ン製造株式会社 | 画像読取り装置 |
FR2606242B1 (fr) * | 1986-10-31 | 1989-02-24 | Thomson Csf | Circuit melangeur video, utilisable pour l'imagerie haute resolution avec des cameras a capteurs matriciels solides |
US4890314A (en) * | 1988-08-26 | 1989-12-26 | Bell Communications Research, Inc. | Teleconference facility with high resolution video display |
GB8915982D0 (en) * | 1989-07-12 | 1990-04-25 | Pilkington Perkin Elmer Ltd | Imaging device |
US5194959A (en) * | 1989-12-21 | 1993-03-16 | Ricoh Company, Ltd. and Nippon Telegraph and Telephone Corporation | Image forming apparatus for forming image corresponding to subject, by dividing optical image corresponding to the subject into plural adjacent optical image parts |
US5686960A (en) * | 1992-01-14 | 1997-11-11 | Michael Sussman | Image input device having optical deflection elements for capturing multiple sub-images |
DE69307007T2 (de) * | 1992-04-22 | 1997-06-26 | Agfa Gevaert Nv | Optisch aneinandergefügte elektro-optische Bauteile |
US5414458A (en) * | 1993-04-06 | 1995-05-09 | Texas Instruments Incorporated | Semiconductor device lead inspection system |
US5380999A (en) * | 1993-12-29 | 1995-01-10 | International Business Machines, Corp. | Linear scanning using a single illumination and imaging optic stations with a first pair of parallel mirrors and a second pair of mirrors extending into paths of light beams |
US6403124B1 (en) * | 1997-04-16 | 2002-06-11 | Sigma-Tau Industrie Farmaceutiche Riunite S.P.A. | Storage and maintenance of blood products including red blood cells and platelets |
DE69841107D1 (de) * | 1997-07-12 | 2009-10-08 | Roper Ind Inc | Multispektraler zweidimensionaler bildgebeuder spekteometer |
US5982497A (en) * | 1998-07-09 | 1999-11-09 | Optical Insights, Llc | Multi-spectral two-dimensional imaging spectrometer |
US6542304B2 (en) | 1999-05-17 | 2003-04-01 | Toolz, Ltd. | Laser beam device with apertured reflective element |
US6856466B2 (en) | 2001-07-05 | 2005-02-15 | Science & Engineering Associates, Inc. | Multiple imaging system |
US7084983B2 (en) * | 2003-01-27 | 2006-08-01 | Zetetic Institute | Interferometric confocal microscopy incorporating a pinhole array beam-splitter |
US20040257577A1 (en) | 2003-01-27 | 2004-12-23 | Zetetic Institute | Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry |
KR20050098268A (ko) * | 2003-01-27 | 2005-10-11 | 제테틱 인스티튜트 | 트렌치의 특성을 측정하는 간섭 공초점 현미경에 사용되는누설 유도파 모드 |
US7164480B2 (en) * | 2003-02-04 | 2007-01-16 | Zetetic Institute | Compensation for effects of mismatch in indices of refraction at a substrate-medium interface in non-confocal, confocal, and interferometric confocal microscopy |
US6717736B1 (en) * | 2003-02-13 | 2004-04-06 | Zetetic Institute | Catoptric and catadioptric imaging systems |
JP2006518488A (ja) * | 2003-02-19 | 2006-08-10 | ゼテテック インスティテュート | 暗視野干渉共焦点顕微鏡使用の方法及び装置 |
US7133139B2 (en) * | 2003-02-19 | 2006-11-07 | Zetetic Institute | Longitudinal differential interferometric confocal microscopy |
US7054077B2 (en) | 2003-04-01 | 2006-05-30 | Zetetic Institute | Method for constructing a catadioptric lens system |
WO2004090465A2 (en) * | 2003-04-01 | 2004-10-21 | Zetetic Institute | Apparatus and method for joint measurement of fields of scattered/reflected or transmitted orthogonally polarized beams by an object in interferometry |
US7064838B2 (en) * | 2003-04-03 | 2006-06-20 | Zetetic Institute | Apparatus and method for measurement of fields of backscattered and forward scattered/reflected beams by an object in interferometry |
WO2005008334A2 (en) | 2003-07-07 | 2005-01-27 | Zetetic Institute | Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology |
US7324209B2 (en) * | 2003-07-07 | 2008-01-29 | Zetetic Institute | Apparatus and method for ellipsometric measurements with high spatial resolution |
US7355722B2 (en) * | 2003-09-10 | 2008-04-08 | Zetetic Institute | Catoptric and catadioptric imaging systems with adaptive catoptric surfaces |
WO2005031397A2 (en) * | 2003-09-26 | 2005-04-07 | Zetetic Institute | Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces |
WO2005033747A2 (en) * | 2003-10-01 | 2005-04-14 | Zetetic Institute | Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy |
US7345771B2 (en) * | 2004-05-06 | 2008-03-18 | Zetetic Institute | Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks |
TW200538704A (en) * | 2004-05-21 | 2005-12-01 | Zetetic Inst | Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry |
US7161680B2 (en) * | 2004-08-16 | 2007-01-09 | Zetetic Institute | Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry |
WO2006023612A2 (en) * | 2004-08-19 | 2006-03-02 | Zetetic Institute | Sub-nanometer overlay, critical dimension, and lithography tool projection optic metrology systems based on measurement of exposure induced changes in photoresist on wafers |
US7145663B2 (en) * | 2004-09-20 | 2006-12-05 | Zetetic Institute | Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2736250A (en) * | 1956-02-28 | Apparatus for taking stereoscopic pictures | ||
US862354A (en) * | 1906-03-31 | 1907-08-06 | Bertha G Stevens | Monocular camera. |
DE697039C (de) * | 1934-03-16 | 1940-10-04 | Isidor Kelemen | lder |
US2403733A (en) * | 1941-05-22 | 1946-07-09 | Mainardi Pompey | Stereoscopic optical system |
US3039358A (en) * | 1955-02-26 | 1962-06-19 | Zeiss Ikon Ag | Means for presenting stereo pictures for viewing |
US3170980A (en) * | 1962-05-09 | 1965-02-23 | Rca Corp | Optical tunnel system |
FR2010939A1 (ja) * | 1968-06-14 | 1970-02-20 | Columbia Broadcasting | |
US3674339A (en) * | 1970-09-16 | 1972-07-04 | Canon Kk | Stereoscopic photograph system using a stereoscopic attachment to a camera |
BE792669A (fr) * | 1971-12-13 | 1973-06-13 | Xerox Corp | Appareil optique de formation d'images |
US4044384A (en) * | 1975-07-24 | 1977-08-23 | Ricoh Co., Ltd. | Optical scanning apparatus |
US4005285A (en) * | 1975-10-30 | 1977-01-25 | Xerox Corporation | Optical system for extending photosensor array resolution |
US4009388A (en) * | 1975-10-30 | 1977-02-22 | Xerox Corporation | Arrangement for extending photosensor array resolution |
JPS5914723B2 (ja) * | 1976-05-22 | 1984-04-05 | 旭光学工業株式会社 | 一眼レフカメラの焦点検出装置 |
US4059757A (en) * | 1976-10-01 | 1977-11-22 | Honeywell Inc. | Focus system for movie cameras |
US4141625A (en) * | 1977-11-28 | 1979-02-27 | Northern Telecom Limited | Optical system for multiple imaging a linear object |
-
1978
- 1978-10-06 US US05/949,179 patent/US4272684A/en not_active Expired - Lifetime
-
1979
- 1979-07-26 CA CA000332576A patent/CA1116907A/en not_active Expired
- 1979-09-27 JP JP12331479A patent/JPS5550213A/ja active Pending
- 1979-10-05 EP EP79302123A patent/EP0009983A1/en not_active Ceased
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5955674A (ja) * | 1982-09-24 | 1984-03-30 | Canon Inc | カラ−原稿読取り装置 |
Also Published As
Publication number | Publication date |
---|---|
US4272684A (en) | 1981-06-09 |
EP0009983A1 (en) | 1980-04-16 |
CA1116907A (en) | 1982-01-26 |
US4272684B1 (ja) | 1983-03-01 |
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