JPS554906A - Semi-conductor manufacturing method - Google Patents
Semi-conductor manufacturing methodInfo
- Publication number
- JPS554906A JPS554906A JP7645978A JP7645978A JPS554906A JP S554906 A JPS554906 A JP S554906A JP 7645978 A JP7645978 A JP 7645978A JP 7645978 A JP7645978 A JP 7645978A JP S554906 A JPS554906 A JP S554906A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- nonmetal
- supplied
- junction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain shallow, uniform p-n junction quickly by supplying p-type ions to an area adjoining non-metalic film after n-type ions are supplied to the other side of the film.
CONSTITUTION: N-type ion impurities are supplied into a semi-conductor substrate either after providing a thin film of non-cristalline nonmetal or nonmetal that has different crystal orientation or lattice constant than the substrate on the substrate, or directly to the substrate without providing the film. By applying the CVD metod, an additional film of non-cristalline nonmetal of a film having different cristal orientation or lattice constant then the substrate is laied on, and p-type ion impurities are supplied through the CVD film to obtain p-n junction. By so doing, the position where density of p-type ion impurities is the maximum becomes shallower, thus forming the p-n junction which has a negative density gradient.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7645978A JPS554906A (en) | 1978-06-26 | 1978-06-26 | Semi-conductor manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7645978A JPS554906A (en) | 1978-06-26 | 1978-06-26 | Semi-conductor manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS554906A true JPS554906A (en) | 1980-01-14 |
Family
ID=13605732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7645978A Pending JPS554906A (en) | 1978-06-26 | 1978-06-26 | Semi-conductor manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS554906A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50143463A (en) * | 1974-05-08 | 1975-11-18 |
-
1978
- 1978-06-26 JP JP7645978A patent/JPS554906A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50143463A (en) * | 1974-05-08 | 1975-11-18 |
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