JPS5546641U - - Google Patents

Info

Publication number: JPS5546641U
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP12835678U

Other versions

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1978-09-18

Filing date

1978-09-18

Publication date

1980-03-27

1978-09-18 Application filed filed Critical

1978-09-18 Priority to JP12835678U priority Critical patent/JPS584921Y2/ja

1980-03-27 Publication of JPS5546641U publication Critical patent/JPS5546641U/ja

1983-01-27 Application granted granted Critical

1983-01-27 Publication of JPS584921Y2 publication Critical patent/JPS584921Y2/ja

Status Expired legal-status Critical Current

Links

Landscapes

Physical Vapour Deposition (AREA)
Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

JP12835678U 1978-09-18 1978-09-18 蒸着におけるウエハ固定装置 Expired JPS584921Y2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP12835678U JPS584921Y2 (ja)	1978-09-18	1978-09-18	蒸着におけるウエハ固定装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP12835678U JPS584921Y2 (ja)	1978-09-18	1978-09-18	蒸着におけるウエハ固定装置

Publications (2)

Publication Number	Publication Date
JPS5546641U true JPS5546641U (ja)	1980-03-27
JPS584921Y2 JPS584921Y2 (ja)	1983-01-27

Family

ID=29091969

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP12835678U Expired JPS584921Y2 (ja)	1978-09-18	1978-09-18	蒸着におけるウエハ固定装置

Country Status (1)

Country	Link
JP (1)	JPS584921Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0338051A (ja) *	1989-06-29	1991-02-19	Applied Materials Inc	半導体ウェーハのハンドリング方法及び装置

1978
- 1978-09-18 JP JP12835678U patent/JPS584921Y2/ja not_active Expired

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0338051A (ja) *	1989-06-29	1991-02-19	Applied Materials Inc	半導体ウェーハのハンドリング方法及び装置

Also Published As

Publication number	Publication date
JPS584921Y2 (ja)	1983-01-27

Similar Documents

Publication	Publication Date	Title
FR2415125B1 (ja)	1982-10-01
DK147399A (ja)
FR2416367B1 (ja)	1985-04-19
FR2416898B1 (ja)	1984-06-15
FR2416853B1 (ja)	1981-11-20
FR2415207B1 (ja)	1984-08-17
FR2414345B1 (ja)	1984-06-01
FR2392807B1 (ja)	1981-07-31
FR2416200B3 (ja)	1981-11-13
FR2414889B1 (ja)	1984-10-26
FR2414635B1 (ja)	1985-04-12
FR2414554B1 (ja)	1980-06-13
FR2416581B1 (ja)	1985-01-11
FR2413939B1 (ja)	1984-02-17
JPS5546641U (ja)	1980-03-27
FR2413936B1 (ja)	1980-07-04
BG26017A1 (ja)	1979-02-15
BG26006A1 (ja)	1979-02-15
BG25857A1 (ja)	1979-01-12
BG26622A1 (ja)	1979-05-15
BG26568A1 (ja)	1979-05-15
BG26519A3 (ja)	1979-04-12
BG26311A1 (ja)	1979-03-15
BG26022A1 (ja)	1979-02-15
BG25971A1 (ja)	1979-01-12