JPS5546641U - - Google Patents
Info
- Publication number
- JPS5546641U JPS5546641U JP12835678U JP12835678U JPS5546641U JP S5546641 U JPS5546641 U JP S5546641U JP 12835678 U JP12835678 U JP 12835678U JP 12835678 U JP12835678 U JP 12835678U JP S5546641 U JPS5546641 U JP S5546641U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12835678U JPS584921Y2 (ja) | 1978-09-18 | 1978-09-18 | 蒸着におけるウエハ固定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12835678U JPS584921Y2 (ja) | 1978-09-18 | 1978-09-18 | 蒸着におけるウエハ固定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5546641U true JPS5546641U (ja) | 1980-03-27 |
JPS584921Y2 JPS584921Y2 (ja) | 1983-01-27 |
Family
ID=29091969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12835678U Expired JPS584921Y2 (ja) | 1978-09-18 | 1978-09-18 | 蒸着におけるウエハ固定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS584921Y2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0338051A (ja) * | 1989-06-29 | 1991-02-19 | Applied Materials Inc | 半導体ウェーハのハンドリング方法及び装置 |
-
1978
- 1978-09-18 JP JP12835678U patent/JPS584921Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0338051A (ja) * | 1989-06-29 | 1991-02-19 | Applied Materials Inc | 半導体ウェーハのハンドリング方法及び装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS584921Y2 (ja) | 1983-01-27 |