JPS5543219A - Cryopump - Google Patents
CryopumpInfo
- Publication number
- JPS5543219A JPS5543219A JP11477078A JP11477078A JPS5543219A JP S5543219 A JPS5543219 A JP S5543219A JP 11477078 A JP11477078 A JP 11477078A JP 11477078 A JP11477078 A JP 11477078A JP S5543219 A JPS5543219 A JP S5543219A
- Authority
- JP
- Japan
- Prior art keywords
- cryogenic fluid
- fins
- pipeline
- fluid pipeline
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
PURPOSE: To make stable exhaustion performable as well as to equalize temperature over all the fins by constituting such that condensing liquid is sent down through the inside of a cryogenic fluid pipe by gravity via a condensing chamber, cooling off the cryogenic fluid pipeline and fins and then evaporating along the way.
CONSTITUTION: In concurrence of flowing out cryogenic fluid condensed in a condensing chamber 4 from a fluid effluent port 10 of the condensing chamber 4 by gravity with cooling off a cryogenic fluid pipeline 3 by flowing down through the cryogenic fluid pipeline 3 which has the both ends respectively connected to up-and-down positions of the condensing chamber 4, fins 5 tightly fixed to the pipeline are cooled off in the simultaneity. Thus, though cryogenic fluid flows through the cryogenic fluid pipeline 3, in proportion to cooling of the cryogenic fluid pipeline 3 and fins 5, it is gradually gasified, gasified gas passes through the cryogenic fluid pipeline 3, and returns through a fluid return port 9 at the top part while cooling off uniformly the cryogenic fluid pipeline 3 itself and fins 5. This facilitates to constantly make exhaustion.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11477078A JPS5543219A (en) | 1978-09-18 | 1978-09-18 | Cryopump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11477078A JPS5543219A (en) | 1978-09-18 | 1978-09-18 | Cryopump |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5543219A true JPS5543219A (en) | 1980-03-27 |
JPS6124551B2 JPS6124551B2 (en) | 1986-06-11 |
Family
ID=14646245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11477078A Granted JPS5543219A (en) | 1978-09-18 | 1978-09-18 | Cryopump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5543219A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57119186A (en) * | 1981-01-14 | 1982-07-24 | Japan Atom Energy Res Inst | Cryo pump |
US4484869A (en) * | 1981-04-24 | 1984-11-27 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Volumetric fluid compressor |
-
1978
- 1978-09-18 JP JP11477078A patent/JPS5543219A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57119186A (en) * | 1981-01-14 | 1982-07-24 | Japan Atom Energy Res Inst | Cryo pump |
JPS6350554B2 (en) * | 1981-01-14 | 1988-10-11 | Japan Atomic Energy Res Inst | |
US4484869A (en) * | 1981-04-24 | 1984-11-27 | Kabushiki Kaisha Toyoda Jidoshokki Seisakusho | Volumetric fluid compressor |
Also Published As
Publication number | Publication date |
---|---|
JPS6124551B2 (en) | 1986-06-11 |
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