JPS5543219A - Cryopump - Google Patents

Abstract

PURPOSE: To make stable exhaustion performable as well as to equalize temperature over all the fins by constituting such that condensing liquid is sent down through the inside of a cryogenic fluid pipe by gravity via a condensing chamber, cooling off the cryogenic fluid pipeline and fins and then evaporating along the way.

CONSTITUTION: In concurrence of flowing out cryogenic fluid condensed in a condensing chamber 4 from a fluid effluent port 10 of the condensing chamber 4 by gravity with cooling off a cryogenic fluid pipeline 3 by flowing down through the cryogenic fluid pipeline 3 which has the both ends respectively connected to up-and-down positions of the condensing chamber 4, fins 5 tightly fixed to the pipeline are cooled off in the simultaneity. Thus, though cryogenic fluid flows through the cryogenic fluid pipeline 3, in proportion to cooling of the cryogenic fluid pipeline 3 and fins 5, it is gradually gasified, gasified gas passes through the cryogenic fluid pipeline 3, and returns through a fluid return port 9 at the top part while cooling off uniformly the cryogenic fluid pipeline 3 itself and fins 5. This facilitates to constantly make exhaustion.

COPYRIGHT: (C)1980,JPO&Japio