JPS5539690A - Plasma etching device - Google Patents
Plasma etching deviceInfo
- Publication number
- JPS5539690A JPS5539690A JP11395178A JP11395178A JPS5539690A JP S5539690 A JPS5539690 A JP S5539690A JP 11395178 A JP11395178 A JP 11395178A JP 11395178 A JP11395178 A JP 11395178A JP S5539690 A JPS5539690 A JP S5539690A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- plasma generating
- generating part
- plate
- separating plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide an uniform etching speed by dividing by a separating plate having a hole between the plasma generating part and the etching part and then by treating a material treated by etching gas blown from the hole.
CONSTITUTION: In a cuartz glass made cylindrical vaccum vessel 51 having an external electrode 52 in its upper surface, a separating plate 53 having an opening to divide the plasma generating part and etching part is installed. In the separating plate 53, and activating particle introducing tube 54 having a cylindrical tube with its diameter of D is installed and in the side of plasma generating part of the plate 53 a plasma shieding plate 55 having many small holes is installed. Further, in the plasma generating part, a etching gas introduction pipe 56 is placed and in the below part of the introducing tube 54, a etching material 58 is mounted on a mounting bace 5 and in its below part an exhaust outlet 59 is installed. By doing so, carbon tetrafluoride is charged to the plasma generating part and gas produced is blown to a material 54 through the introducing tube 54 to effect an etching treatment.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11395178A JPS5539690A (en) | 1978-09-14 | 1978-09-14 | Plasma etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11395178A JPS5539690A (en) | 1978-09-14 | 1978-09-14 | Plasma etching device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5539690A true JPS5539690A (en) | 1980-03-19 |
Family
ID=14625286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11395178A Pending JPS5539690A (en) | 1978-09-14 | 1978-09-14 | Plasma etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5539690A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4340461A (en) * | 1980-09-10 | 1982-07-20 | International Business Machines Corp. | Modified RIE chamber for uniform silicon etching |
| JPS6042832A (en) * | 1983-08-18 | 1985-03-07 | Matsushita Electric Ind Co Ltd | Ion beam device |
| JPH04336418A (en) * | 1991-05-13 | 1992-11-24 | Sumitomo Metal Ind Ltd | Ashing device |
| JPH0511435U (en) * | 1991-07-24 | 1993-02-12 | 住友金属工業株式会社 | Asssing device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52122236A (en) * | 1976-04-07 | 1977-10-14 | Tokyo Shibaura Electric Co | Etching device |
-
1978
- 1978-09-14 JP JP11395178A patent/JPS5539690A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52122236A (en) * | 1976-04-07 | 1977-10-14 | Tokyo Shibaura Electric Co | Etching device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4340461A (en) * | 1980-09-10 | 1982-07-20 | International Business Machines Corp. | Modified RIE chamber for uniform silicon etching |
| JPS6042832A (en) * | 1983-08-18 | 1985-03-07 | Matsushita Electric Ind Co Ltd | Ion beam device |
| JPH0347573B2 (en) * | 1983-08-18 | 1991-07-19 | Matsushita Electric Ind Co Ltd | |
| JPH04336418A (en) * | 1991-05-13 | 1992-11-24 | Sumitomo Metal Ind Ltd | Ashing device |
| JPH0511435U (en) * | 1991-07-24 | 1993-02-12 | 住友金属工業株式会社 | Asssing device |
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