JPS5527773A - Solid state pickup device - Google Patents
Solid state pickup deviceInfo
- Publication number
- JPS5527773A JPS5527773A JP10109678A JP10109678A JPS5527773A JP S5527773 A JPS5527773 A JP S5527773A JP 10109678 A JP10109678 A JP 10109678A JP 10109678 A JP10109678 A JP 10109678A JP S5527773 A JPS5527773 A JP S5527773A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- electrode
- low
- lessen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
PURPOSE: To form the pickup element featuring a high uniformity with the low current by providing the low-melting glass insulator film in case the photoconductive film is formed on the semiconductor substrate on which the charge transfer type or X matrix type circuit element is formed.
CONSTITUTION: The 1st insulator layer 15 made of the low-melting glass insulator film is formed on p-type semiconductor substrate 10 possessing gate oxide film 16 and 1st gate electrode 14 forming the step error part, and the contact window of the area same as or smaller than n+-type region 11 is drilled. After this, the heat treatment is given to lessen all step errors for electrode 14, film 16, the contact part and others. Thus the disconnection is prevented for the metal wiring. Then 1st electrode 17, positive hole blocking layer 19 and photoconductor layer 20 are formed on layer 15 thus formed to lessen the concentration of the electric field to the heterojunction, thus forming a unit of the solid state pickup device featuring a high uniformity with the low current.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53101096A JPS6042667B2 (en) | 1978-08-18 | 1978-08-18 | solid-state imaging device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53101096A JPS6042667B2 (en) | 1978-08-18 | 1978-08-18 | solid-state imaging device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5527773A true JPS5527773A (en) | 1980-02-28 |
JPS6042667B2 JPS6042667B2 (en) | 1985-09-24 |
Family
ID=14291552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53101096A Expired JPS6042667B2 (en) | 1978-08-18 | 1978-08-18 | solid-state imaging device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6042667B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62150168U (en) * | 1986-03-17 | 1987-09-22 | ||
JPH047168U (en) * | 1990-05-10 | 1992-01-22 |
-
1978
- 1978-08-18 JP JP53101096A patent/JPS6042667B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6042667B2 (en) | 1985-09-24 |
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