JPS5520406A - Shape examination unit - Google Patents
Shape examination unitInfo
- Publication number
- JPS5520406A JPS5520406A JP9250778A JP9250778A JPS5520406A JP S5520406 A JPS5520406 A JP S5520406A JP 9250778 A JP9250778 A JP 9250778A JP 9250778 A JP9250778 A JP 9250778A JP S5520406 A JPS5520406 A JP S5520406A
- Authority
- JP
- Japan
- Prior art keywords
- light
- reference value
- converter
- mirror
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To examine an edge form rapidly, accurately and easily by irradiating a coherent parallel light to a measured object an subjecting the reflection light to Fourier conversion and receiving prescribed higher light components of the converted light by a photoelectric converter and comparing obtained electric signals with a reference value.
CONSTITUTION: The laser light from laser light source 31 is made into a parallel light by collimator 32, and wafer 38 is scanned through half mirror 36 and lens 37 by scanning mirror 33. The reflection light from wafer 38 through resistor 39 is led to photoelectric converter array 42, which is placed on the focusing face, through Fourier conversion lens 37 and half mirror 36. The output signal is converted to a digital signal by A/D converter 44 and is led to computer 45 which controls the drive of driving mechanism 46 of mirror 33 and driving mechanism 41 of stage 40. The digital value obtained when a resistor having a regular edge angle is examined is peviously stored in a memory circuit as a reference value, and computer 45 compares the digital value, which is the output of A/D converter 44, with the reference value above and outputs an anomaly signal in case of their difference outside a prescribed range.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9250778A JPS5520406A (en) | 1978-07-31 | 1978-07-31 | Shape examination unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9250778A JPS5520406A (en) | 1978-07-31 | 1978-07-31 | Shape examination unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5520406A true JPS5520406A (en) | 1980-02-13 |
Family
ID=14056216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9250778A Pending JPS5520406A (en) | 1978-07-31 | 1978-07-31 | Shape examination unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5520406A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0488653A (en) * | 1990-07-31 | 1992-03-23 | Nec Corp | Semiconductor element positioning device |
US6266137B1 (en) | 1998-04-10 | 2001-07-24 | Nec Corporation | Particle detecting apparatus using two light beams |
-
1978
- 1978-07-31 JP JP9250778A patent/JPS5520406A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0488653A (en) * | 1990-07-31 | 1992-03-23 | Nec Corp | Semiconductor element positioning device |
US6266137B1 (en) | 1998-04-10 | 2001-07-24 | Nec Corporation | Particle detecting apparatus using two light beams |
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