JPS55154351A - Hydrophilic membrane - Google Patents

Hydrophilic membrane

Info

Publication number
JPS55154351A
JPS55154351A JP6243979A JP6243979A JPS55154351A JP S55154351 A JPS55154351 A JP S55154351A JP 6243979 A JP6243979 A JP 6243979A JP 6243979 A JP6243979 A JP 6243979A JP S55154351 A JPS55154351 A JP S55154351A
Authority
JP
Japan
Prior art keywords
oxide
membrane
cloud
durability
well
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6243979A
Other languages
Japanese (ja)
Inventor
Nobuaki Yoshida
Masasato Satou
Kazufumi Ishibashi
Koji Otake
Michiro Kariya
Teruo Kaneko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP6243979A priority Critical patent/JPS55154351A/en
Publication of JPS55154351A publication Critical patent/JPS55154351A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To enhance the cloud-proof property and durability of the titled membrane by a method wherein a hydrophilic membrane containing one or more of an oxide selected from an oxide of Mo and W as well as at least of a phosphorus oxide is formed on a substrate surface by a known method. CONSTITUTION:A phosphorus oxide is a substance containing PO4<-3> or PO3<-3> other than P2O5 and an oxide of Mo or W is similar. A membrane containing one or more of this oxide of Mo and W and at least of a phosphorus oxide is formed on a substrate by a membrane forming technique such as a vapor deposition, a sputtering, an ion plating, a plasma deposition or a chemical gas phase method. The membrane obtained by this method is excellent in hydrophilic property, cloud- proofness as well as durability and can maintain those effects for a long period of time.
JP6243979A 1979-05-21 1979-05-21 Hydrophilic membrane Pending JPS55154351A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6243979A JPS55154351A (en) 1979-05-21 1979-05-21 Hydrophilic membrane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6243979A JPS55154351A (en) 1979-05-21 1979-05-21 Hydrophilic membrane

Publications (1)

Publication Number Publication Date
JPS55154351A true JPS55154351A (en) 1980-12-01

Family

ID=13200223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6243979A Pending JPS55154351A (en) 1979-05-21 1979-05-21 Hydrophilic membrane

Country Status (1)

Country Link
JP (1) JPS55154351A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5869187A (en) * 1996-03-07 1999-02-09 Nissan Motor Co., Ltd. Defogging article and method of producing same
US6045903A (en) * 1997-06-09 2000-04-04 Nissan Motor Co., Ltd. Hydrophilic article and method for producing same
US6071606A (en) * 1996-08-26 2000-06-06 Nissan Motor Co., Ltd Hydrophilic film and method for forming same on substrate
US6110269A (en) * 1997-01-22 2000-08-29 Nissan Motor Co., Ltd. Coating liquid for forming hydrophilic film and method for producing same
EP1336592A1 (en) * 2002-02-12 2003-08-20 Canon Kabushiki Kaisha Anti-fogging coating material, anti-fogging coating, and anti-fogging optical member
JP2018120105A (en) * 2017-01-26 2018-08-02 キヤノン株式会社 Optical member and imaging system using the same
WO2018168963A1 (en) * 2017-03-15 2018-09-20 キヤノンオプトロン株式会社 Hydrophilic vapor deposition film and vapor deposition material

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5869187A (en) * 1996-03-07 1999-02-09 Nissan Motor Co., Ltd. Defogging article and method of producing same
US6071606A (en) * 1996-08-26 2000-06-06 Nissan Motor Co., Ltd Hydrophilic film and method for forming same on substrate
US6110269A (en) * 1997-01-22 2000-08-29 Nissan Motor Co., Ltd. Coating liquid for forming hydrophilic film and method for producing same
US6045903A (en) * 1997-06-09 2000-04-04 Nissan Motor Co., Ltd. Hydrophilic article and method for producing same
EP1336592A1 (en) * 2002-02-12 2003-08-20 Canon Kabushiki Kaisha Anti-fogging coating material, anti-fogging coating, and anti-fogging optical member
US6783845B2 (en) 2002-02-12 2004-08-31 Canon Kabushiki Kaisha Anti-fogging coating material, anti-fogging coating, and anti-fogging optical member
JP2018120105A (en) * 2017-01-26 2018-08-02 キヤノン株式会社 Optical member and imaging system using the same
WO2018168963A1 (en) * 2017-03-15 2018-09-20 キヤノンオプトロン株式会社 Hydrophilic vapor deposition film and vapor deposition material
CN110475901A (en) * 2017-03-15 2019-11-19 佳能奥普特龙株式会社 Hydrophily evaporation film and evaporation material
JPWO2018168963A1 (en) * 2017-03-15 2020-03-05 キヤノンオプトロン株式会社 Hydrophilic deposition film and deposition material
TWI752194B (en) * 2017-03-15 2022-01-11 日商佳能奧普特龍股份有限公司 Hydrophilic vapor deposition film, vapor deposition material, multilayer film, and manufacturing method of hydrophilic vapor deposition film
CN110475901B (en) * 2017-03-15 2022-08-09 佳能奥普特龙株式会社 Hydrophilic vapor deposition film and vapor deposition material

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