JPS55148436A - Probe base plate - Google Patents

Probe base plate

Info

Publication number
JPS55148436A
JPS55148436A JP5725279A JP5725279A JPS55148436A JP S55148436 A JPS55148436 A JP S55148436A JP 5725279 A JP5725279 A JP 5725279A JP 5725279 A JP5725279 A JP 5725279A JP S55148436 A JPS55148436 A JP S55148436A
Authority
JP
Japan
Prior art keywords
base plate
probe base
probe
socket
terminals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5725279A
Other languages
Japanese (ja)
Other versions
JPS626653B2 (en
Inventor
Masaaki Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP5725279A priority Critical patent/JPS55148436A/en
Publication of JPS55148436A publication Critical patent/JPS55148436A/en
Publication of JPS626653B2 publication Critical patent/JPS626653B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To confirm the multi-needle probe base plate by overlaying the second prove base plate on which a defectless semiconductor device is mounted, to a testing probe base plate which has electrical connections with it. CONSTITUTION:On the first probe base plate 1, a plural number of probe needles 2 are arranged to be correspondent with each electrode on a semiconductor device, and a plural number of terminals 5 which are arranged electrical connections with each probe needle 2 and in the same way with electrodes 4 of the base plate. On the second plate 6 a socket 8 on which a defectless sample is to be inserted is provided, and each electrode on the socket 8 is connected with terminals 7 which are disposed arround the socket 8. A defectless sample is inserted into the socket 8, and with terminals 5 of the probe base plate 1 connected with terminals 7 of the probe base plate 6, a multi-needle probe base plate is confirmed with ease.
JP5725279A 1979-05-10 1979-05-10 Probe base plate Granted JPS55148436A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5725279A JPS55148436A (en) 1979-05-10 1979-05-10 Probe base plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5725279A JPS55148436A (en) 1979-05-10 1979-05-10 Probe base plate

Publications (2)

Publication Number Publication Date
JPS55148436A true JPS55148436A (en) 1980-11-19
JPS626653B2 JPS626653B2 (en) 1987-02-12

Family

ID=13050331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5725279A Granted JPS55148436A (en) 1979-05-10 1979-05-10 Probe base plate

Country Status (1)

Country Link
JP (1) JPS55148436A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514022A (en) * 1983-06-29 1985-04-30 Tektronix, Inc. Probe cable assemblies
US4716500A (en) * 1985-10-18 1987-12-29 Tektronix, Inc. Probe cable assembly
US4926117A (en) * 1988-05-02 1990-05-15 Micron Technology, Inc. Burn-in board having discrete test capability
US5923176A (en) * 1991-08-19 1999-07-13 Ncr Corporation High speed test fixture

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102379U (en) * 1977-01-20 1978-08-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102379U (en) * 1977-01-20 1978-08-18

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514022A (en) * 1983-06-29 1985-04-30 Tektronix, Inc. Probe cable assemblies
US4716500A (en) * 1985-10-18 1987-12-29 Tektronix, Inc. Probe cable assembly
US4926117A (en) * 1988-05-02 1990-05-15 Micron Technology, Inc. Burn-in board having discrete test capability
US5923176A (en) * 1991-08-19 1999-07-13 Ncr Corporation High speed test fixture

Also Published As

Publication number Publication date
JPS626653B2 (en) 1987-02-12

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