JPS5514605A - Device for correcting astigmatism of electron microscope and the like having field emission type electron gun - Google Patents

Device for correcting astigmatism of electron microscope and the like having field emission type electron gun

Info

Publication number
JPS5514605A
JPS5514605A JP8605578A JP8605578A JPS5514605A JP S5514605 A JPS5514605 A JP S5514605A JP 8605578 A JP8605578 A JP 8605578A JP 8605578 A JP8605578 A JP 8605578A JP S5514605 A JPS5514605 A JP S5514605A
Authority
JP
Japan
Prior art keywords
field emission
astigmatism
electron gun
astigmatism correcting
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8605578A
Other languages
Japanese (ja)
Inventor
Akimitsu Okura
Kimio Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8605578A priority Critical patent/JPS5514605A/en
Publication of JPS5514605A publication Critical patent/JPS5514605A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To readily correct the astigmatism of an electron microscope having a field emission (FE) electron gun by varying an electric current flowing through one of a plurality of astigmatism correcting coils in response to the acceleration voltage of the electron gun.
CONSTITUTION: In an electronic microscope having a field emission (FE) electron gun the field emission electrons 5 generated from a tip 1 are corrected at their astigmatism by a first astigmatism correcting coil 20 disposed between a condenser lens 12 and the electron gun, and a second astigmatism correcting coil 21 disposed between the condenser lens 12 and an objective lens 12. The first astigmatism correcting coil 20 is connected to the first astigmatism correcting electric circuit 22 to thereby flow the astigmatism correcting current varying in response to the acceleration voltage Vo. Thus, a beginner can readily focus the microscope.
COPYRIGHT: (C)1980,JPO&Japio
JP8605578A 1978-07-17 1978-07-17 Device for correcting astigmatism of electron microscope and the like having field emission type electron gun Pending JPS5514605A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8605578A JPS5514605A (en) 1978-07-17 1978-07-17 Device for correcting astigmatism of electron microscope and the like having field emission type electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8605578A JPS5514605A (en) 1978-07-17 1978-07-17 Device for correcting astigmatism of electron microscope and the like having field emission type electron gun

Publications (1)

Publication Number Publication Date
JPS5514605A true JPS5514605A (en) 1980-02-01

Family

ID=13875994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8605578A Pending JPS5514605A (en) 1978-07-17 1978-07-17 Device for correcting astigmatism of electron microscope and the like having field emission type electron gun

Country Status (1)

Country Link
JP (1) JPS5514605A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60205952A (en) * 1984-03-30 1985-10-17 Hitachi Ltd Electron microscope
US4688013A (en) * 1985-05-09 1987-08-18 Mitsubishi Denki Kabushiki Kaisha Switchgear assembly for electrical apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60205952A (en) * 1984-03-30 1985-10-17 Hitachi Ltd Electron microscope
US4688013A (en) * 1985-05-09 1987-08-18 Mitsubishi Denki Kabushiki Kaisha Switchgear assembly for electrical apparatus

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