JPS5514605A - Device for correcting astigmatism of electron microscope and the like having field emission type electron gun - Google Patents
Device for correcting astigmatism of electron microscope and the like having field emission type electron gunInfo
- Publication number
- JPS5514605A JPS5514605A JP8605578A JP8605578A JPS5514605A JP S5514605 A JPS5514605 A JP S5514605A JP 8605578 A JP8605578 A JP 8605578A JP 8605578 A JP8605578 A JP 8605578A JP S5514605 A JPS5514605 A JP S5514605A
- Authority
- JP
- Japan
- Prior art keywords
- field emission
- astigmatism
- electron gun
- astigmatism correcting
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To readily correct the astigmatism of an electron microscope having a field emission (FE) electron gun by varying an electric current flowing through one of a plurality of astigmatism correcting coils in response to the acceleration voltage of the electron gun.
CONSTITUTION: In an electronic microscope having a field emission (FE) electron gun the field emission electrons 5 generated from a tip 1 are corrected at their astigmatism by a first astigmatism correcting coil 20 disposed between a condenser lens 12 and the electron gun, and a second astigmatism correcting coil 21 disposed between the condenser lens 12 and an objective lens 12. The first astigmatism correcting coil 20 is connected to the first astigmatism correcting electric circuit 22 to thereby flow the astigmatism correcting current varying in response to the acceleration voltage Vo. Thus, a beginner can readily focus the microscope.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8605578A JPS5514605A (en) | 1978-07-17 | 1978-07-17 | Device for correcting astigmatism of electron microscope and the like having field emission type electron gun |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8605578A JPS5514605A (en) | 1978-07-17 | 1978-07-17 | Device for correcting astigmatism of electron microscope and the like having field emission type electron gun |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5514605A true JPS5514605A (en) | 1980-02-01 |
Family
ID=13875994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8605578A Pending JPS5514605A (en) | 1978-07-17 | 1978-07-17 | Device for correcting astigmatism of electron microscope and the like having field emission type electron gun |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5514605A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60205952A (en) * | 1984-03-30 | 1985-10-17 | Hitachi Ltd | Electron microscope |
US4688013A (en) * | 1985-05-09 | 1987-08-18 | Mitsubishi Denki Kabushiki Kaisha | Switchgear assembly for electrical apparatus |
-
1978
- 1978-07-17 JP JP8605578A patent/JPS5514605A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60205952A (en) * | 1984-03-30 | 1985-10-17 | Hitachi Ltd | Electron microscope |
US4688013A (en) * | 1985-05-09 | 1987-08-18 | Mitsubishi Denki Kabushiki Kaisha | Switchgear assembly for electrical apparatus |
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