JPS52136578A - Electron beam exposure apparatus - Google Patents
Electron beam exposure apparatusInfo
- Publication number
- JPS52136578A JPS52136578A JP5315776A JP5315776A JPS52136578A JP S52136578 A JPS52136578 A JP S52136578A JP 5315776 A JP5315776 A JP 5315776A JP 5315776 A JP5315776 A JP 5315776A JP S52136578 A JPS52136578 A JP S52136578A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure apparatus
- beam exposure
- magnetic field
- negates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To achieve the evening of the magnetic field of an electron beam exposure apparatus by detecting the variation of the magnetic field and flowing the current which negates this in a Helmholtz's coil.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5315776A JPS52136578A (en) | 1976-05-12 | 1976-05-12 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5315776A JPS52136578A (en) | 1976-05-12 | 1976-05-12 | Electron beam exposure apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52136578A true JPS52136578A (en) | 1977-11-15 |
Family
ID=12935000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5315776A Pending JPS52136578A (en) | 1976-05-12 | 1976-05-12 | Electron beam exposure apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52136578A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5869934U (en) * | 1981-11-05 | 1983-05-12 | 東芝機械株式会社 | Magnetic shield cover for electron beam lithography equipment |
JPH0282612A (en) * | 1988-09-20 | 1990-03-23 | Hitachi Ltd | Apparatus and method of correcting external magnetism of electron beam lithography equipment |
JPH0636741A (en) * | 1992-07-10 | 1994-02-10 | Shimadzu Corp | Magnetic field type mass spectrometer |
-
1976
- 1976-05-12 JP JP5315776A patent/JPS52136578A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5869934U (en) * | 1981-11-05 | 1983-05-12 | 東芝機械株式会社 | Magnetic shield cover for electron beam lithography equipment |
JPH0282612A (en) * | 1988-09-20 | 1990-03-23 | Hitachi Ltd | Apparatus and method of correcting external magnetism of electron beam lithography equipment |
JPH0636741A (en) * | 1992-07-10 | 1994-02-10 | Shimadzu Corp | Magnetic field type mass spectrometer |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51131389A (en) | Device for uniform polarized magnetic field | |
JPS52136578A (en) | Electron beam exposure apparatus | |
JPS56107460A (en) | Electron lens | |
JPS526073A (en) | Magnetic field type electronic lens | |
JPS5232525A (en) | High voltage generator | |
JPS5220063A (en) | Location detector | |
JPS5370405A (en) | Mode switching unit in record-reproducing apparatus | |
JPS5220037A (en) | Magnetic transfer device of magnetic toner | |
JPS5218163A (en) | Exposure meter of electronic microscope | |
JPS5363595A (en) | Magnetic bubble device | |
JPS549650A (en) | Moving-coil type instrument of pointer transverse travel system | |
JPS5350978A (en) | Electron beam exposure method | |
JPS5223349A (en) | Electrostatic developing method and device | |
JPS5313912A (en) | Magnetic tape copying device | |
JPS5430045A (en) | Developing apparatus for zerography | |
JPS5268941A (en) | Anti time-limiting apparatus | |
JPS5222668A (en) | Electro magnet brake | |
JPS5280067A (en) | Measuring method for resistance of transformer windings | |
JPS5291111A (en) | Frequency generator | |
JPS51144238A (en) | Magnetic toner transcription method | |
JPS5354066A (en) | Large current detecting device | |
JPS5329184A (en) | Eddy current flaw detector | |
JPS52116121A (en) | Automatic measurement method for cylindrical magnetic block#s field | |
JPS5360558A (en) | Electron lens | |
JPS51134826A (en) | Core fastening device for inductive electric instrument |