JPS55113322A - Impurity diffusion - Google Patents
Impurity diffusionInfo
- Publication number
- JPS55113322A JPS55113322A JP2043479A JP2043479A JPS55113322A JP S55113322 A JPS55113322 A JP S55113322A JP 2043479 A JP2043479 A JP 2043479A JP 2043479 A JP2043479 A JP 2043479A JP S55113322 A JPS55113322 A JP S55113322A
- Authority
- JP
- Japan
- Prior art keywords
- film
- diffusion layer
- iiiwv
- sio
- ohmic electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To coat one or more kinds of W, Mo, Ta, Hf on the surface of IIIWV group semiconductor, to provide a diffusion layer through this metal film without introducing a local distortion and to provide an ohmic electrode.
CONSTITUTION: An opening is made on the SiO2 film provided on p-type InP substrate 11, and this opening is covered by evaporating W film 13. Next, this is exposed to a Zn atomosphere. Since Zn hardly reacts with W, it passes through extremely small holes of the W film and do not pass through the SiO2 film so that Zn diffusion layer 14 is formed. In particular, II group elements hardly react with W, Mo, Ta, Hf, so that they can be easily diffused in IIIWV group semiconductor compound. Further, the alloying reaction between W film 13 and the InP substrate is extremely small, so that an ohmic electrode with small contact resistance is obtained. Also, IV or VI group elements can be diffused. But, in this case, compounds with metal film coating 13 are formed, so that the diffusion layer is made shallow.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2043479A JPS55113322A (en) | 1979-02-22 | 1979-02-22 | Impurity diffusion |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2043479A JPS55113322A (en) | 1979-02-22 | 1979-02-22 | Impurity diffusion |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55113322A true JPS55113322A (en) | 1980-09-01 |
Family
ID=12026929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2043479A Pending JPS55113322A (en) | 1979-02-22 | 1979-02-22 | Impurity diffusion |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55113322A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07249407A (en) * | 1994-03-11 | 1995-09-26 | Saga Denki Kogyo Kk | Battery liquid feeder |
-
1979
- 1979-02-22 JP JP2043479A patent/JPS55113322A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07249407A (en) * | 1994-03-11 | 1995-09-26 | Saga Denki Kogyo Kk | Battery liquid feeder |
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