JPS551129A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS551129A JPS551129A JP7387778A JP7387778A JPS551129A JP S551129 A JPS551129 A JP S551129A JP 7387778 A JP7387778 A JP 7387778A JP 7387778 A JP7387778 A JP 7387778A JP S551129 A JPS551129 A JP S551129A
- Authority
- JP
- Japan
- Prior art keywords
- film
- aluminium
- aluminium wiring
- snapping
- prevented
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the snapping-off of aluminium wiring, by producing Al2O3 on the surface of the aluminium wiring film and thereafter coating an insulating film on the Al2O3 at a temperature lower than the melting point of aluminium.
CONSTITUTION: The aluminium wiring film 4 is made on a P-type silicon substrate 1 having a field oxide film 2 and a gate oxide film 3. The Al2O3 5 is produced on the film 4 by O2 plasma. An Si3N4 layer 6 is then produced on the layer 5 by plasma reaction. The corrosion and snapping-off of the aluminium is thus prevented. Because the thermal expansion coefficient difference between the aluminium wiring film and the protective insulating film is small, the cracking of the protective film due to heat shock is prevented.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7387778A JPS551129A (en) | 1978-06-19 | 1978-06-19 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7387778A JPS551129A (en) | 1978-06-19 | 1978-06-19 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS551129A true JPS551129A (en) | 1980-01-07 |
Family
ID=13530859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7387778A Pending JPS551129A (en) | 1978-06-19 | 1978-06-19 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS551129A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5986244A (en) * | 1982-11-09 | 1984-05-18 | Nec Corp | Semiconductor device |
JPS61255037A (en) * | 1985-05-08 | 1986-11-12 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPS6236843A (en) * | 1985-08-10 | 1987-02-17 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1978
- 1978-06-19 JP JP7387778A patent/JPS551129A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5986244A (en) * | 1982-11-09 | 1984-05-18 | Nec Corp | Semiconductor device |
JPS61255037A (en) * | 1985-05-08 | 1986-11-12 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPS6236843A (en) * | 1985-08-10 | 1987-02-17 | Fujitsu Ltd | Manufacture of semiconductor device |
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