JPS5489344A - Manufacture of heater resistor - Google Patents

Manufacture of heater resistor

Info

Publication number
JPS5489344A
JPS5489344A JP15764477A JP15764477A JPS5489344A JP S5489344 A JPS5489344 A JP S5489344A JP 15764477 A JP15764477 A JP 15764477A JP 15764477 A JP15764477 A JP 15764477A JP S5489344 A JPS5489344 A JP S5489344A
Authority
JP
Japan
Prior art keywords
layer
alloy
metal
heater resistor
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15764477A
Other languages
Japanese (ja)
Other versions
JPS5842954B2 (en
Inventor
Nobuyoshi Taguchi
Koji Matsuo
Hiroshi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP52157644A priority Critical patent/JPS5842954B2/en
Publication of JPS5489344A publication Critical patent/JPS5489344A/en
Publication of JPS5842954B2 publication Critical patent/JPS5842954B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)

Abstract

PURPOSE: In a heater resistor consisting of metalic Si alloy, to ensure that the reis resistor can be made easily and at low cost by only heat treating laminated element layers, without complicated control of the alloy.
CONSTITUTION: A glaze layer 2, Si layer 3, and metal layers 4-6 are formed one after another on an insulating ceramic base 1. In or after the formation of patterns, a heat treatment is conducted to combine the Si layer 3 and metal layer 4, to form an alloy layer 7 which works as a heater resistor. Metallic layers 5 and 6 above the layer 7 are used as first and second electrodes. The metal layer 4 is made of Cr or the like, layer 5 being made of a high-melting metal such as Mo, and the layer 6 is made of Ni or the like matal resistance oxidation or an alloy such as Ni-Zr.
COPYRIGHT: (C)1979,JPO&Japio
JP52157644A 1977-12-27 1977-12-27 Method of forming heating resistor Expired JPS5842954B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52157644A JPS5842954B2 (en) 1977-12-27 1977-12-27 Method of forming heating resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52157644A JPS5842954B2 (en) 1977-12-27 1977-12-27 Method of forming heating resistor

Publications (2)

Publication Number Publication Date
JPS5489344A true JPS5489344A (en) 1979-07-16
JPS5842954B2 JPS5842954B2 (en) 1983-09-22

Family

ID=15654219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52157644A Expired JPS5842954B2 (en) 1977-12-27 1977-12-27 Method of forming heating resistor

Country Status (1)

Country Link
JP (1) JPS5842954B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034768A (en) * 1973-08-01 1975-04-03
JPS5038832A (en) * 1973-08-11 1975-04-10

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034768A (en) * 1973-08-01 1975-04-03
JPS5038832A (en) * 1973-08-11 1975-04-10

Also Published As

Publication number Publication date
JPS5842954B2 (en) 1983-09-22

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