JPS5489344A - Manufacture of heater resistor - Google Patents
Manufacture of heater resistorInfo
- Publication number
- JPS5489344A JPS5489344A JP15764477A JP15764477A JPS5489344A JP S5489344 A JPS5489344 A JP S5489344A JP 15764477 A JP15764477 A JP 15764477A JP 15764477 A JP15764477 A JP 15764477A JP S5489344 A JPS5489344 A JP S5489344A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- alloy
- metal
- heater resistor
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Resistance Heating (AREA)
- Surface Heating Bodies (AREA)
Abstract
PURPOSE: In a heater resistor consisting of metalic Si alloy, to ensure that the reis resistor can be made easily and at low cost by only heat treating laminated element layers, without complicated control of the alloy.
CONSTITUTION: A glaze layer 2, Si layer 3, and metal layers 4-6 are formed one after another on an insulating ceramic base 1. In or after the formation of patterns, a heat treatment is conducted to combine the Si layer 3 and metal layer 4, to form an alloy layer 7 which works as a heater resistor. Metallic layers 5 and 6 above the layer 7 are used as first and second electrodes. The metal layer 4 is made of Cr or the like, layer 5 being made of a high-melting metal such as Mo, and the layer 6 is made of Ni or the like matal resistance oxidation or an alloy such as Ni-Zr.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52157644A JPS5842954B2 (en) | 1977-12-27 | 1977-12-27 | Method of forming heating resistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52157644A JPS5842954B2 (en) | 1977-12-27 | 1977-12-27 | Method of forming heating resistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5489344A true JPS5489344A (en) | 1979-07-16 |
JPS5842954B2 JPS5842954B2 (en) | 1983-09-22 |
Family
ID=15654219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52157644A Expired JPS5842954B2 (en) | 1977-12-27 | 1977-12-27 | Method of forming heating resistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5842954B2 (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5034768A (en) * | 1973-08-01 | 1975-04-03 | ||
JPS5038832A (en) * | 1973-08-11 | 1975-04-10 |
-
1977
- 1977-12-27 JP JP52157644A patent/JPS5842954B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5034768A (en) * | 1973-08-01 | 1975-04-03 | ||
JPS5038832A (en) * | 1973-08-11 | 1975-04-10 |
Also Published As
Publication number | Publication date |
---|---|
JPS5842954B2 (en) | 1983-09-22 |
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