JPS53133800A - Method of manufacturing thin film resistor element - Google Patents

Method of manufacturing thin film resistor element

Info

Publication number
JPS53133800A
JPS53133800A JP4888077A JP4888077A JPS53133800A JP S53133800 A JPS53133800 A JP S53133800A JP 4888077 A JP4888077 A JP 4888077A JP 4888077 A JP4888077 A JP 4888077A JP S53133800 A JPS53133800 A JP S53133800A
Authority
JP
Japan
Prior art keywords
thin film
resistor element
film resistor
manufacturing thin
nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4888077A
Other languages
Japanese (ja)
Inventor
Takeshi Nishizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4888077A priority Critical patent/JPS53133800A/en
Publication of JPS53133800A publication Critical patent/JPS53133800A/en
Pending legal-status Critical Current

Links

Landscapes

  • Adjustable Resistors (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

PURPOSE: To permit formation of a variable resistor of high resistance and excellent noise characteristics by laminating a composite thin film of conductive nitride and insulating nitride, a chromium layer and an oxidation-proof metal layer one above another in the mentioned order and subjection the lamination thus formed to a heat treatment in an oxidizing atmosphere.
COPYRIGHT: (C)1978,JPO&Japio
JP4888077A 1977-04-26 1977-04-26 Method of manufacturing thin film resistor element Pending JPS53133800A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4888077A JPS53133800A (en) 1977-04-26 1977-04-26 Method of manufacturing thin film resistor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4888077A JPS53133800A (en) 1977-04-26 1977-04-26 Method of manufacturing thin film resistor element

Publications (1)

Publication Number Publication Date
JPS53133800A true JPS53133800A (en) 1978-11-21

Family

ID=12815590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4888077A Pending JPS53133800A (en) 1977-04-26 1977-04-26 Method of manufacturing thin film resistor element

Country Status (1)

Country Link
JP (1) JPS53133800A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4464646A (en) * 1980-08-02 1984-08-07 Robert Bosch Gmbh Controlled temperature coefficient thin-film circuit element
JP2004288981A (en) * 2003-03-24 2004-10-14 Mitsubishi Materials Corp Thin film resistance material, resistor using same, and method of manufacturing resistor
CN115762938A (en) * 2022-11-28 2023-03-07 北京东方计量测试研究所 Metal foil resistor comprehensive performance improvement method and metal foil resistor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4464646A (en) * 1980-08-02 1984-08-07 Robert Bosch Gmbh Controlled temperature coefficient thin-film circuit element
JP2004288981A (en) * 2003-03-24 2004-10-14 Mitsubishi Materials Corp Thin film resistance material, resistor using same, and method of manufacturing resistor
CN115762938A (en) * 2022-11-28 2023-03-07 北京东方计量测试研究所 Metal foil resistor comprehensive performance improvement method and metal foil resistor

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