JPS53133800A - Method of manufacturing thin film resistor element - Google Patents
Method of manufacturing thin film resistor elementInfo
- Publication number
- JPS53133800A JPS53133800A JP4888077A JP4888077A JPS53133800A JP S53133800 A JPS53133800 A JP S53133800A JP 4888077 A JP4888077 A JP 4888077A JP 4888077 A JP4888077 A JP 4888077A JP S53133800 A JPS53133800 A JP S53133800A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- resistor element
- film resistor
- manufacturing thin
- nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Adjustable Resistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Abstract
PURPOSE: To permit formation of a variable resistor of high resistance and excellent noise characteristics by laminating a composite thin film of conductive nitride and insulating nitride, a chromium layer and an oxidation-proof metal layer one above another in the mentioned order and subjection the lamination thus formed to a heat treatment in an oxidizing atmosphere.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4888077A JPS53133800A (en) | 1977-04-26 | 1977-04-26 | Method of manufacturing thin film resistor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4888077A JPS53133800A (en) | 1977-04-26 | 1977-04-26 | Method of manufacturing thin film resistor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53133800A true JPS53133800A (en) | 1978-11-21 |
Family
ID=12815590
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4888077A Pending JPS53133800A (en) | 1977-04-26 | 1977-04-26 | Method of manufacturing thin film resistor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53133800A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4464646A (en) * | 1980-08-02 | 1984-08-07 | Robert Bosch Gmbh | Controlled temperature coefficient thin-film circuit element |
JP2004288981A (en) * | 2003-03-24 | 2004-10-14 | Mitsubishi Materials Corp | Thin film resistance material, resistor using same, and method of manufacturing resistor |
CN115762938A (en) * | 2022-11-28 | 2023-03-07 | 北京东方计量测试研究所 | Metal foil resistor comprehensive performance improvement method and metal foil resistor |
-
1977
- 1977-04-26 JP JP4888077A patent/JPS53133800A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4464646A (en) * | 1980-08-02 | 1984-08-07 | Robert Bosch Gmbh | Controlled temperature coefficient thin-film circuit element |
JP2004288981A (en) * | 2003-03-24 | 2004-10-14 | Mitsubishi Materials Corp | Thin film resistance material, resistor using same, and method of manufacturing resistor |
CN115762938A (en) * | 2022-11-28 | 2023-03-07 | 北京东方计量测试研究所 | Metal foil resistor comprehensive performance improvement method and metal foil resistor |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5477081A (en) | Semiconductor device and production of the same | |
JPS5365088A (en) | Semiconductor device | |
JPS53133800A (en) | Method of manufacturing thin film resistor element | |
JPS5394881A (en) | Integrated circuit device | |
JPS5350986A (en) | Josephson integrated circuit by multilayer structure | |
JPS5340884A (en) | Self-cohesive insulated wire | |
JPS5420671A (en) | Production of semiconductor devices | |
JPS5460558A (en) | Electrode forming method | |
JPS53118390A (en) | Thin film luminous element | |
JPS5563287A (en) | Thermal head | |
JPS53134066A (en) | Manufacture of polytetrafluoroethylene laminate | |
JPS52156584A (en) | Multilayer wiring type semiconductor device | |
JPS5561056A (en) | High resistance structure of integrated circuit | |
JPS53146341A (en) | Heating element | |
JPS5720374A (en) | Method of forming crossover in thermal head | |
JPS5368970A (en) | Solder electrode structure | |
JPS5441673A (en) | Semiconductor device and its manufacture | |
JPS5421290A (en) | Integrated circuit device and its manufacture | |
JPS533066A (en) | Electrode formation method | |
JPS5692079A (en) | Film-coated thermal head | |
JPS5489344A (en) | Manufacture of heater resistor | |
JPS51134894A (en) | Manufacturing method of metallic film resistor | |
JPS5350500A (en) | Mica lamination | |
JPS5258464A (en) | Semiconductor device | |
JPS538683A (en) | Plastic-coated metal strip and its manufacturing |