JPS548455A - Cleansing/drying device for products - Google Patents
Cleansing/drying device for productsInfo
- Publication number
- JPS548455A JPS548455A JP7320977A JP7320977A JPS548455A JP S548455 A JPS548455 A JP S548455A JP 7320977 A JP7320977 A JP 7320977A JP 7320977 A JP7320977 A JP 7320977A JP S548455 A JPS548455 A JP S548455A
- Authority
- JP
- Japan
- Prior art keywords
- cleansing
- drying device
- products
- negative pressure
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7320977A JPS548455A (en) | 1977-06-22 | 1977-06-22 | Cleansing/drying device for products |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7320977A JPS548455A (en) | 1977-06-22 | 1977-06-22 | Cleansing/drying device for products |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS548455A true JPS548455A (en) | 1979-01-22 |
Family
ID=13511524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7320977A Pending JPS548455A (en) | 1977-06-22 | 1977-06-22 | Cleansing/drying device for products |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS548455A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5844838U (ja) * | 1981-09-21 | 1983-03-25 | 三菱電機株式会社 | ウエ−ハ洗浄乾燥装置 |
JPS61179741U (ja) * | 1985-04-25 | 1986-11-10 | ||
JPS6232530U (ja) * | 1985-08-09 | 1987-02-26 | ||
JPS6287434U (ja) * | 1985-11-21 | 1987-06-04 | ||
JPH01110736A (ja) * | 1987-10-23 | 1989-04-27 | Tokyo Electron Ltd | 洗浄装置及び洗浄方法 |
JPH04222676A (ja) * | 1990-03-15 | 1992-08-12 | Sl Electrostatic Technol Inc | 積層部品の水蒸気洗浄のための方法および装置 |
JP2008504674A (ja) * | 2004-06-14 | 2008-02-14 | エフエスアイ インターナショナル インコーポレイテッド | 1つ以上のウエハ上に液体を排出して乾燥処理するための装置及び方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4935435A (ja) * | 1972-08-09 | 1974-04-02 |
-
1977
- 1977-06-22 JP JP7320977A patent/JPS548455A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4935435A (ja) * | 1972-08-09 | 1974-04-02 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5844838U (ja) * | 1981-09-21 | 1983-03-25 | 三菱電機株式会社 | ウエ−ハ洗浄乾燥装置 |
JPS61179741U (ja) * | 1985-04-25 | 1986-11-10 | ||
JPS6232530U (ja) * | 1985-08-09 | 1987-02-26 | ||
JPH0513008Y2 (ja) * | 1985-08-09 | 1993-04-06 | ||
JPS6287434U (ja) * | 1985-11-21 | 1987-06-04 | ||
JPH01110736A (ja) * | 1987-10-23 | 1989-04-27 | Tokyo Electron Ltd | 洗浄装置及び洗浄方法 |
JPH04222676A (ja) * | 1990-03-15 | 1992-08-12 | Sl Electrostatic Technol Inc | 積層部品の水蒸気洗浄のための方法および装置 |
JP2008504674A (ja) * | 2004-06-14 | 2008-02-14 | エフエスアイ インターナショナル インコーポレイテッド | 1つ以上のウエハ上に液体を排出して乾燥処理するための装置及び方法 |
JP4807528B2 (ja) * | 2004-06-14 | 2011-11-02 | エフエスアイ インターナショナル インコーポレイテッド | 1つ以上のウエハ上に液体を排出して乾燥処理するための装置及び方法 |
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