JPS5482383A - Manufacturing apparatus for single crystal - Google Patents

Manufacturing apparatus for single crystal

Info

Publication number
JPS5482383A
JPS5482383A JP14930977A JP14930977A JPS5482383A JP S5482383 A JPS5482383 A JP S5482383A JP 14930977 A JP14930977 A JP 14930977A JP 14930977 A JP14930977 A JP 14930977A JP S5482383 A JPS5482383 A JP S5482383A
Authority
JP
Japan
Prior art keywords
crystal
crucible
signal
senser
liq
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14930977A
Other languages
Japanese (ja)
Inventor
Hideo Nakanishi
Keigo Hoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP14930977A priority Critical patent/JPS5482383A/en
Publication of JPS5482383A publication Critical patent/JPS5482383A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To manufacture good quality single crystal of constant diameter, by moving a crucible under optimum conditions corresponding to the temp. distribution in a vessel, and by controlling pulling-up rate for the crystal corresponding to the detected signal given by a photo senser of detecting region including solid/liq. interface meniscus.
CONSTITUTION: A program signal generator 6 produces program signal fp, which realizes optimum crystal growth conditions, corresponding to the temp. distribution in a vessel, and according to the signal fp, crucible -moving controller 4 moves a crucible 9 through a crucible-moving shaft 12. Synchronizing with the vertical motion of the crystal, a photo senser 1 moves so as to keep the relative distance between the senser 1 and the molten liq. surface. The photo senser 1 is formed at the outer periphery of solid/liq. interface, and detects the strength of light reflected from the detecting zone including meniscus, the ratio of area occupied by the meniscus to that of the detecting region depending upon the diameter of the crystal. The detdcted signal is compared by a comparator R with the set signal sent from a reference value setting apparatus 2. When there is difference between those signals, a speed controller operates and adjust the pulling-up speed for the crystal 7 through a shaft 11 for pulling up the crystal.
COPYRIGHT: (C)1979,JPO&Japio
JP14930977A 1977-12-14 1977-12-14 Manufacturing apparatus for single crystal Pending JPS5482383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14930977A JPS5482383A (en) 1977-12-14 1977-12-14 Manufacturing apparatus for single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14930977A JPS5482383A (en) 1977-12-14 1977-12-14 Manufacturing apparatus for single crystal

Publications (1)

Publication Number Publication Date
JPS5482383A true JPS5482383A (en) 1979-06-30

Family

ID=15472302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14930977A Pending JPS5482383A (en) 1977-12-14 1977-12-14 Manufacturing apparatus for single crystal

Country Status (1)

Country Link
JP (1) JPS5482383A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63274687A (en) * 1987-05-06 1988-11-11 Kokusai Electric Co Ltd Method and device for controlling diameter of single crystal
WO1992019797A1 (en) * 1991-04-26 1992-11-12 Mitsubishi Materials Corporation Process for pulling up single crystal

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4949306A (en) * 1972-06-06 1974-05-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4949306A (en) * 1972-06-06 1974-05-13

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63274687A (en) * 1987-05-06 1988-11-11 Kokusai Electric Co Ltd Method and device for controlling diameter of single crystal
WO1992019797A1 (en) * 1991-04-26 1992-11-12 Mitsubishi Materials Corporation Process for pulling up single crystal
US5408952A (en) * 1991-04-26 1995-04-25 Mitsubishi Materials Corporation Single crystal growth method

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