JPS5482383A - Manufacturing apparatus for single crystal - Google Patents
Manufacturing apparatus for single crystalInfo
- Publication number
- JPS5482383A JPS5482383A JP14930977A JP14930977A JPS5482383A JP S5482383 A JPS5482383 A JP S5482383A JP 14930977 A JP14930977 A JP 14930977A JP 14930977 A JP14930977 A JP 14930977A JP S5482383 A JPS5482383 A JP S5482383A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- crucible
- signal
- senser
- liq
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To manufacture good quality single crystal of constant diameter, by moving a crucible under optimum conditions corresponding to the temp. distribution in a vessel, and by controlling pulling-up rate for the crystal corresponding to the detected signal given by a photo senser of detecting region including solid/liq. interface meniscus.
CONSTITUTION: A program signal generator 6 produces program signal fp, which realizes optimum crystal growth conditions, corresponding to the temp. distribution in a vessel, and according to the signal fp, crucible -moving controller 4 moves a crucible 9 through a crucible-moving shaft 12. Synchronizing with the vertical motion of the crystal, a photo senser 1 moves so as to keep the relative distance between the senser 1 and the molten liq. surface. The photo senser 1 is formed at the outer periphery of solid/liq. interface, and detects the strength of light reflected from the detecting zone including meniscus, the ratio of area occupied by the meniscus to that of the detecting region depending upon the diameter of the crystal. The detdcted signal is compared by a comparator R with the set signal sent from a reference value setting apparatus 2. When there is difference between those signals, a speed controller operates and adjust the pulling-up speed for the crystal 7 through a shaft 11 for pulling up the crystal.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14930977A JPS5482383A (en) | 1977-12-14 | 1977-12-14 | Manufacturing apparatus for single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14930977A JPS5482383A (en) | 1977-12-14 | 1977-12-14 | Manufacturing apparatus for single crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5482383A true JPS5482383A (en) | 1979-06-30 |
Family
ID=15472302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14930977A Pending JPS5482383A (en) | 1977-12-14 | 1977-12-14 | Manufacturing apparatus for single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5482383A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63274687A (en) * | 1987-05-06 | 1988-11-11 | Kokusai Electric Co Ltd | Method and device for controlling diameter of single crystal |
WO1992019797A1 (en) * | 1991-04-26 | 1992-11-12 | Mitsubishi Materials Corporation | Process for pulling up single crystal |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4949306A (en) * | 1972-06-06 | 1974-05-13 |
-
1977
- 1977-12-14 JP JP14930977A patent/JPS5482383A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4949306A (en) * | 1972-06-06 | 1974-05-13 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63274687A (en) * | 1987-05-06 | 1988-11-11 | Kokusai Electric Co Ltd | Method and device for controlling diameter of single crystal |
WO1992019797A1 (en) * | 1991-04-26 | 1992-11-12 | Mitsubishi Materials Corporation | Process for pulling up single crystal |
US5408952A (en) * | 1991-04-26 | 1995-04-25 | Mitsubishi Materials Corporation | Single crystal growth method |
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