JPS5481078A - Test method for wafer using wafer carrier - Google Patents
Test method for wafer using wafer carrierInfo
- Publication number
- JPS5481078A JPS5481078A JP14903177A JP14903177A JPS5481078A JP S5481078 A JPS5481078 A JP S5481078A JP 14903177 A JP14903177 A JP 14903177A JP 14903177 A JP14903177 A JP 14903177A JP S5481078 A JPS5481078 A JP S5481078A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- integrated circuit
- circuit chip
- test
- test method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To secure execution of the wafer level test without using the wafer prober by connecting plural number of conductive pins to be connected to the pad formed on the wafer to the test device.
CONSTITUTION: The pairs of proper voltage or current are applied to integrated circuit chip 4a, 4b, 4c or 4d on the wafer via conductive pin 12. And the expected value is compared with the output. Then the switch circuit within wiring region 3 is controlled by the external control signal after the test of one integrated circuit chip in order to select the next integrated circuit chip to be tested.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14903177A JPS5481078A (en) | 1977-12-12 | 1977-12-12 | Test method for wafer using wafer carrier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14903177A JPS5481078A (en) | 1977-12-12 | 1977-12-12 | Test method for wafer using wafer carrier |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5481078A true JPS5481078A (en) | 1979-06-28 |
Family
ID=15466146
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14903177A Pending JPS5481078A (en) | 1977-12-12 | 1977-12-12 | Test method for wafer using wafer carrier |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5481078A (en) |
-
1977
- 1977-12-12 JP JP14903177A patent/JPS5481078A/en active Pending
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