JPS5480685A - Dry etching method - Google Patents
Dry etching methodInfo
- Publication number
- JPS5480685A JPS5480685A JP14781677A JP14781677A JPS5480685A JP S5480685 A JPS5480685 A JP S5480685A JP 14781677 A JP14781677 A JP 14781677A JP 14781677 A JP14781677 A JP 14781677A JP S5480685 A JPS5480685 A JP S5480685A
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- etching method
- dry
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14781677A JPS5480685A (en) | 1977-12-09 | 1977-12-09 | Dry etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14781677A JPS5480685A (en) | 1977-12-09 | 1977-12-09 | Dry etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5480685A true JPS5480685A (en) | 1979-06-27 |
Family
ID=15438862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14781677A Pending JPS5480685A (en) | 1977-12-09 | 1977-12-09 | Dry etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5480685A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57164529A (en) * | 1981-04-03 | 1982-10-09 | Oki Electric Ind Co Ltd | Dry etching method |
JPH01230238A (en) * | 1989-01-27 | 1989-09-13 | Oki Electric Ind Co Ltd | Dry etching method |
-
1977
- 1977-12-09 JP JP14781677A patent/JPS5480685A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57164529A (en) * | 1981-04-03 | 1982-10-09 | Oki Electric Ind Co Ltd | Dry etching method |
JPH0160939B2 (en) * | 1981-04-03 | 1989-12-26 | Oki Electric Ind Co Ltd | |
JPH01230238A (en) * | 1989-01-27 | 1989-09-13 | Oki Electric Ind Co Ltd | Dry etching method |
JPH0547977B2 (en) * | 1989-01-27 | 1993-07-20 | Oki Electric Ind Co Ltd |
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