JPS5480685A - Dry etching method - Google Patents

Dry etching method

Info

Publication number
JPS5480685A
JPS5480685A JP14781677A JP14781677A JPS5480685A JP S5480685 A JPS5480685 A JP S5480685A JP 14781677 A JP14781677 A JP 14781677A JP 14781677 A JP14781677 A JP 14781677A JP S5480685 A JPS5480685 A JP S5480685A
Authority
JP
Japan
Prior art keywords
dry etching
etching method
dry
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14781677A
Other languages
Japanese (ja)
Inventor
Hiroshi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU URU ESU AI GIJIYUTSU KE
Original Assignee
CHIYOU URU ESU AI GIJIYUTSU KE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU URU ESU AI GIJIYUTSU KE filed Critical CHIYOU URU ESU AI GIJIYUTSU KE
Priority to JP14781677A priority Critical patent/JPS5480685A/en
Publication of JPS5480685A publication Critical patent/JPS5480685A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP14781677A 1977-12-09 1977-12-09 Dry etching method Pending JPS5480685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14781677A JPS5480685A (en) 1977-12-09 1977-12-09 Dry etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14781677A JPS5480685A (en) 1977-12-09 1977-12-09 Dry etching method

Publications (1)

Publication Number Publication Date
JPS5480685A true JPS5480685A (en) 1979-06-27

Family

ID=15438862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14781677A Pending JPS5480685A (en) 1977-12-09 1977-12-09 Dry etching method

Country Status (1)

Country Link
JP (1) JPS5480685A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57164529A (en) * 1981-04-03 1982-10-09 Oki Electric Ind Co Ltd Dry etching method
JPH01230238A (en) * 1989-01-27 1989-09-13 Oki Electric Ind Co Ltd Dry etching method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57164529A (en) * 1981-04-03 1982-10-09 Oki Electric Ind Co Ltd Dry etching method
JPH0160939B2 (en) * 1981-04-03 1989-12-26 Oki Electric Ind Co Ltd
JPH01230238A (en) * 1989-01-27 1989-09-13 Oki Electric Ind Co Ltd Dry etching method
JPH0547977B2 (en) * 1989-01-27 1993-07-20 Oki Electric Ind Co Ltd

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