JPS5480196A - Semiconductor gas sensor - Google Patents
Semiconductor gas sensorInfo
- Publication number
- JPS5480196A JPS5480196A JP14749477A JP14749477A JPS5480196A JP S5480196 A JPS5480196 A JP S5480196A JP 14749477 A JP14749477 A JP 14749477A JP 14749477 A JP14749477 A JP 14749477A JP S5480196 A JPS5480196 A JP S5480196A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- detecting
- gate electrode
- same substrate
- transistors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE: To improve the selectivity of plural kinds of gas, enhance the quality and durability, and obtain small-sized high-reliablity sensor, by disposing plural gas detecting transistors on the same substrate.
CONSTITUTION: More than two kinds of transistors, for instance, transistor A for detecting carbon monoxide and transistor B for detecting methane gas, are formed on the same substrate 1, and the materials for gate electrode are different for each gas to be detected. In this constitution, in the presence of a specific gas, when the gas enters the gate electrode, a polarization layer is formed on the gate oxide film boundary surface, and the work function between the gate electrode substance and silicon substrate varies, which causes the threshold value to be deviated. Thus, the change in the threshold value may be detected. By detecting plural kinds of gas with MOS transistors sharing the same substrate in this way, the gas selectivity, quality and durability may be improved, so that the high-reliability sensor may be obtained.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14749477A JPS5480196A (en) | 1977-12-08 | 1977-12-08 | Semiconductor gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14749477A JPS5480196A (en) | 1977-12-08 | 1977-12-08 | Semiconductor gas sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5480196A true JPS5480196A (en) | 1979-06-26 |
Family
ID=15431646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14749477A Pending JPS5480196A (en) | 1977-12-08 | 1977-12-08 | Semiconductor gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5480196A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007529722A (en) * | 2004-03-18 | 2007-10-25 | ミクロナス ゲーエムベーハー | Device for detecting gas or gas mixture |
| WO2024105985A1 (en) * | 2022-11-14 | 2024-05-23 | 株式会社日立製作所 | Gas sensor chip, gas sensing system, and production method for gas sensor chip |
-
1977
- 1977-12-08 JP JP14749477A patent/JPS5480196A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007529722A (en) * | 2004-03-18 | 2007-10-25 | ミクロナス ゲーエムベーハー | Device for detecting gas or gas mixture |
| WO2024105985A1 (en) * | 2022-11-14 | 2024-05-23 | 株式会社日立製作所 | Gas sensor chip, gas sensing system, and production method for gas sensor chip |
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