JPS5477151A - Optical step meter - Google Patents
Optical step meterInfo
- Publication number
- JPS5477151A JPS5477151A JP14332077A JP14332077A JPS5477151A JP S5477151 A JPS5477151 A JP S5477151A JP 14332077 A JP14332077 A JP 14332077A JP 14332077 A JP14332077 A JP 14332077A JP S5477151 A JPS5477151 A JP S5477151A
- Authority
- JP
- Japan
- Prior art keywords
- bright spot
- print plate
- test piece
- metering
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
PURPOSE: To make it possible to accurately meter the pattern thickness of a print plate wiring in a non-contact manner by shifting an optical system for irradiating the surface of a test piece, which is made of plural different materials, relative to the test piece.
CONSTITUTION: A print plate, which has its ceramic substrate 5 printed with a wiring pattern 4, is irradiated with the laser beam from its source 1 to establish a bright spot 6. An optical system, which is composed of a reflected light detector 9 for metering the reflected scattered light from the bright spot 6, a lens 3 for focusing the bright spot 6, and a position metering device 2 for metering the position of the real image of the bright spot 6, is shifted relative to the print plate so that the change in the material of the test piece is judged by the guantity of light entering the detector 9 and so that the positional shift of the real image of the bright spot 6 is metered by the device 2. Thus, it is possible to meter the thickness of the print plate wiring pattern without damaging the surface in a non-contact manner.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14332077A JPS5477151A (en) | 1977-12-01 | 1977-12-01 | Optical step meter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14332077A JPS5477151A (en) | 1977-12-01 | 1977-12-01 | Optical step meter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5477151A true JPS5477151A (en) | 1979-06-20 |
Family
ID=15336030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14332077A Pending JPS5477151A (en) | 1977-12-01 | 1977-12-01 | Optical step meter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5477151A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6098305A (en) * | 1983-10-14 | 1985-06-01 | オプテイツシエ.ウエルケ.ゲー.ローデンストツク | Method and device for inspecting surface of structure member |
JPH0199286A (en) * | 1987-10-13 | 1989-04-18 | Mitsubishi Electric Corp | Screen printing |
GB2510858B (en) * | 2013-02-15 | 2017-05-10 | Swain Stephen | A table or chair levelling device |
-
1977
- 1977-12-01 JP JP14332077A patent/JPS5477151A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6098305A (en) * | 1983-10-14 | 1985-06-01 | オプテイツシエ.ウエルケ.ゲー.ローデンストツク | Method and device for inspecting surface of structure member |
JPH0199286A (en) * | 1987-10-13 | 1989-04-18 | Mitsubishi Electric Corp | Screen printing |
GB2510858B (en) * | 2013-02-15 | 2017-05-10 | Swain Stephen | A table or chair levelling device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4070116A (en) | Gap measuring device for defining the distance between two or more surfaces | |
US5162642A (en) | Device for detecting the position of a surface | |
US3712740A (en) | Method for the automatic alignment of two articles to be brought into register with one another | |
JPS5616802A (en) | Method and unit for measuring electro-optically dimension,position and form of object | |
JPS5553425A (en) | Pattern inspection | |
JPS5759107A (en) | Method and device for measuring plate thickness | |
JPS647618A (en) | Method and apparatus for exposing semiconductor | |
JPS5477151A (en) | Optical step meter | |
JPS57181537A (en) | Light pattern projector | |
KR100195136B1 (en) | Device for measuring height of object | |
JPS57179704A (en) | Method and device for measuring length | |
JPS55154402A (en) | Shape measuring apparatus | |
JPS5767815A (en) | Measuring method for position of reflector using light | |
JPS62140418A (en) | Position detector of surface | |
JPS5612729A (en) | ?alignmening device for ic projection exposure equipment | |
JPS5616806A (en) | Surface roughness measuring unit | |
KR950004369A (en) | Projection Exposure Apparatus and Method | |
JPS59164910A (en) | Distance measuring apparatus | |
JPS56126745A (en) | Automatic inspecting device for surface of plate material | |
JPH05267117A (en) | Method and device for detecting and setting gap between mask and substrate | |
JPS56130606A (en) | Optical measuring device for thickness of transparent material | |
JPS54114261A (en) | Measuring apparatus of surface undulations | |
JPS5694742A (en) | Electronic beam exposure device | |
JPS5612728A (en) | Alignmening device for ic projection exposure equipment | |
KR960035040A (en) | Terminal inspection device for electronic parts |