JPS546455A - Dicing method for semiconductor wafer - Google Patents
Dicing method for semiconductor waferInfo
- Publication number
- JPS546455A JPS546455A JP7109177A JP7109177A JPS546455A JP S546455 A JPS546455 A JP S546455A JP 7109177 A JP7109177 A JP 7109177A JP 7109177 A JP7109177 A JP 7109177A JP S546455 A JPS546455 A JP S546455A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- dicing method
- dicing
- pelletizing
- sticking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Abstract
PURPOSE: To simplify the handling control by sticking an adhesive sheet to the reverse surface of a substrate and by pelletizing it.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7109177A JPS546455A (en) | 1977-06-17 | 1977-06-17 | Dicing method for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7109177A JPS546455A (en) | 1977-06-17 | 1977-06-17 | Dicing method for semiconductor wafer |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58222013A Division JPS59130440A (en) | 1983-11-28 | 1983-11-28 | Method for separating plates |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS546455A true JPS546455A (en) | 1979-01-18 |
Family
ID=13450509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7109177A Pending JPS546455A (en) | 1977-06-17 | 1977-06-17 | Dicing method for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS546455A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56169332A (en) * | 1980-05-31 | 1981-12-26 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
-
1977
- 1977-06-17 JP JP7109177A patent/JPS546455A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56169332A (en) * | 1980-05-31 | 1981-12-26 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
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