JPS53110378A - Plasma carrying device - Google Patents
Plasma carrying deviceInfo
- Publication number
- JPS53110378A JPS53110378A JP2477777A JP2477777A JPS53110378A JP S53110378 A JPS53110378 A JP S53110378A JP 2477777 A JP2477777 A JP 2477777A JP 2477777 A JP2477777 A JP 2477777A JP S53110378 A JPS53110378 A JP S53110378A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- carrying device
- plasma carrying
- simplify
- ensuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To simplify the structure of the deposition device for the semiconductor substrate by the plasma current or the etching device and also ensuring a stabilized operation for a long time, by using the microwave discharge via a disc waveguide for the plasma growing means used in the plasma generating chamber.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2477777A JPS53110378A (en) | 1977-03-09 | 1977-03-09 | Plasma carrying device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2477777A JPS53110378A (en) | 1977-03-09 | 1977-03-09 | Plasma carrying device |
Related Child Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17294883A Division JPS59103341A (en) | 1983-09-21 | 1983-09-21 | Plasma processing apparatus |
JP17294683A Division JPS59103331A (en) | 1983-09-21 | 1983-09-21 | Plasma processing apparatus |
JP17294783A Division JPS59103340A (en) | 1983-09-21 | 1983-09-21 | Plasma processing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53110378A true JPS53110378A (en) | 1978-09-27 |
JPS6139730B2 JPS6139730B2 (en) | 1986-09-05 |
Family
ID=12147595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2477777A Granted JPS53110378A (en) | 1977-03-09 | 1977-03-09 | Plasma carrying device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53110378A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5440078A (en) * | 1977-09-06 | 1979-03-28 | Fujitsu Ltd | Ion milling device |
JPS56155535A (en) * | 1980-05-02 | 1981-12-01 | Nippon Telegr & Teleph Corp <Ntt> | Film forming device utilizing plasma |
JPS59100516A (en) * | 1982-11-12 | 1984-06-09 | エナ−ジ−・コンバ−シヨン・デバイセス・インコ−ポレ−テツド | Apparatus and assembly for producing photocell element |
JP2009130154A (en) * | 2007-11-26 | 2009-06-11 | Ulvac Japan Ltd | Vacuum processing apparatus |
CN117105521A (en) * | 2023-10-25 | 2023-11-24 | 武汉市飞瓴光电科技有限公司 | Device and method for preparing doped silicon dioxide material |
-
1977
- 1977-03-09 JP JP2477777A patent/JPS53110378A/en active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5440078A (en) * | 1977-09-06 | 1979-03-28 | Fujitsu Ltd | Ion milling device |
JPS5615570B2 (en) * | 1977-09-06 | 1981-04-10 | ||
JPS56155535A (en) * | 1980-05-02 | 1981-12-01 | Nippon Telegr & Teleph Corp <Ntt> | Film forming device utilizing plasma |
JPS6243335B2 (en) * | 1980-05-02 | 1987-09-12 | Nippon Telegraph & Telephone | |
JPS59100516A (en) * | 1982-11-12 | 1984-06-09 | エナ−ジ−・コンバ−シヨン・デバイセス・インコ−ポレ−テツド | Apparatus and assembly for producing photocell element |
JP2009130154A (en) * | 2007-11-26 | 2009-06-11 | Ulvac Japan Ltd | Vacuum processing apparatus |
CN117105521A (en) * | 2023-10-25 | 2023-11-24 | 武汉市飞瓴光电科技有限公司 | Device and method for preparing doped silicon dioxide material |
CN117105521B (en) * | 2023-10-25 | 2024-01-19 | 武汉市飞瓴光电科技有限公司 | Device and method for preparing doped silicon dioxide material |
Also Published As
Publication number | Publication date |
---|---|
JPS6139730B2 (en) | 1986-09-05 |
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