JPS5453549A - Multilayer thin film optical system - Google Patents
Multilayer thin film optical systemInfo
- Publication number
- JPS5453549A JPS5453549A JP11969577A JP11969577A JPS5453549A JP S5453549 A JPS5453549 A JP S5453549A JP 11969577 A JP11969577 A JP 11969577A JP 11969577 A JP11969577 A JP 11969577A JP S5453549 A JPS5453549 A JP S5453549A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- mgf
- tio
- layer
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Filters (AREA)
- Surface Treatment Of Optical Elements (AREA)
Abstract
PURPOSE: To suppress the absorption on the visible range short wavelength side and prevent the occurrence of film cracking by substituting at least one layer with a specific thin film layer in a thin film optical system formed through alternate vapor deposition and lamination of TiO2 and MgF2 at substrate temperatures below 230°C.
CONSTITUTION: In the thin film optical system which is formed through alternate vapor deposition and lamination of TiO2 and MgF2 on a substrate of 230°C or under and which does not have absorption on the visible range short wavelength side, at least one layer of the TiO2 films is substituted with the film of a compound, such as zinc sulfide, cerium dioxide or the like, having a refractive index close to that of TiO2 and yet having compressive stress, whereby the occurrence of film cracking is prevented. In lieu of said substitution, the substitution of at least one layer of the MgF2 films with the film of a compound, such as thorium fluoride, silicon dioxide or the like, having a refractive index close to that of MgF2 and yet having compressive stress, gives equally good results
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52119695A JPS6042445B2 (en) | 1977-10-05 | 1977-10-05 | Multilayer thin film optical system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52119695A JPS6042445B2 (en) | 1977-10-05 | 1977-10-05 | Multilayer thin film optical system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5453549A true JPS5453549A (en) | 1979-04-26 |
JPS6042445B2 JPS6042445B2 (en) | 1985-09-21 |
Family
ID=14767768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52119695A Expired JPS6042445B2 (en) | 1977-10-05 | 1977-10-05 | Multilayer thin film optical system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6042445B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5831307A (en) * | 1981-08-20 | 1983-02-24 | Tokyo Optical Co Ltd | Interference filter |
JPS62240903A (en) * | 1986-04-14 | 1987-10-21 | Toshiba Glass Co Ltd | Multi-layered reflection mirror |
WO2005114266A1 (en) * | 2004-05-24 | 2005-12-01 | Jenoptik Laser Optik Systeme Gmbh | High-reflecting dielectric mirror and method for the production thereof |
CN103233200A (en) * | 2013-03-28 | 2013-08-07 | 同济大学 | 355 nm high threshold high reflection film preparation method |
-
1977
- 1977-10-05 JP JP52119695A patent/JPS6042445B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5831307A (en) * | 1981-08-20 | 1983-02-24 | Tokyo Optical Co Ltd | Interference filter |
JPH031645B2 (en) * | 1981-08-20 | 1991-01-11 | Topukon Kk | |
JPS62240903A (en) * | 1986-04-14 | 1987-10-21 | Toshiba Glass Co Ltd | Multi-layered reflection mirror |
WO2005114266A1 (en) * | 2004-05-24 | 2005-12-01 | Jenoptik Laser Optik Systeme Gmbh | High-reflecting dielectric mirror and method for the production thereof |
CN103233200A (en) * | 2013-03-28 | 2013-08-07 | 同济大学 | 355 nm high threshold high reflection film preparation method |
Also Published As
Publication number | Publication date |
---|---|
JPS6042445B2 (en) | 1985-09-21 |
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