JPS5451373A - Sample processor of scanning electron micro-scope and similar unit - Google Patents
Sample processor of scanning electron micro-scope and similar unitInfo
- Publication number
- JPS5451373A JPS5451373A JP11674277A JP11674277A JPS5451373A JP S5451373 A JPS5451373 A JP S5451373A JP 11674277 A JP11674277 A JP 11674277A JP 11674277 A JP11674277 A JP 11674277A JP S5451373 A JPS5451373 A JP S5451373A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- chamber
- processing chamber
- air lock
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11674277A JPS5856952B2 (ja) | 1977-09-30 | 1977-09-30 | 走査電子顕微鏡およびその類似装置の試料処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11674277A JPS5856952B2 (ja) | 1977-09-30 | 1977-09-30 | 走査電子顕微鏡およびその類似装置の試料処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5451373A true JPS5451373A (en) | 1979-04-23 |
JPS5856952B2 JPS5856952B2 (ja) | 1983-12-17 |
Family
ID=14694652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11674277A Expired JPS5856952B2 (ja) | 1977-09-30 | 1977-09-30 | 走査電子顕微鏡およびその類似装置の試料処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5856952B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016122668A (ja) * | 2016-04-06 | 2016-07-07 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
-
1977
- 1977-09-30 JP JP11674277A patent/JPS5856952B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016122668A (ja) * | 2016-04-06 | 2016-07-07 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5856952B2 (ja) | 1983-12-17 |
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