JPS5451373A - Sample processor of scanning electron micro-scope and similar unit - Google Patents

Sample processor of scanning electron micro-scope and similar unit

Info

Publication number
JPS5451373A
JPS5451373A JP11674277A JP11674277A JPS5451373A JP S5451373 A JPS5451373 A JP S5451373A JP 11674277 A JP11674277 A JP 11674277A JP 11674277 A JP11674277 A JP 11674277A JP S5451373 A JPS5451373 A JP S5451373A
Authority
JP
Japan
Prior art keywords
sample
chamber
processing chamber
air lock
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11674277A
Other languages
English (en)
Other versions
JPS5856952B2 (ja
Inventor
Akimitsu Okura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11674277A priority Critical patent/JPS5856952B2/ja
Publication of JPS5451373A publication Critical patent/JPS5451373A/ja
Publication of JPS5856952B2 publication Critical patent/JPS5856952B2/ja
Expired legal-status Critical Current

Links

JP11674277A 1977-09-30 1977-09-30 走査電子顕微鏡およびその類似装置の試料処理装置 Expired JPS5856952B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11674277A JPS5856952B2 (ja) 1977-09-30 1977-09-30 走査電子顕微鏡およびその類似装置の試料処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11674277A JPS5856952B2 (ja) 1977-09-30 1977-09-30 走査電子顕微鏡およびその類似装置の試料処理装置

Publications (2)

Publication Number Publication Date
JPS5451373A true JPS5451373A (en) 1979-04-23
JPS5856952B2 JPS5856952B2 (ja) 1983-12-17

Family

ID=14694652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11674277A Expired JPS5856952B2 (ja) 1977-09-30 1977-09-30 走査電子顕微鏡およびその類似装置の試料処理装置

Country Status (1)

Country Link
JP (1) JPS5856952B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016122668A (ja) * 2016-04-06 2016-07-07 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016122668A (ja) * 2016-04-06 2016-07-07 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPS5856952B2 (ja) 1983-12-17

Similar Documents

Publication Publication Date Title
JPS52119473A (en) Reclamation apparatus for active carbon
GB1251526A (ja)
JPS5478076A (en) Frozen sample observation device of scanning electron microscope and similar unit
JPS5451373A (en) Sample processor of scanning electron micro-scope and similar unit
JPS5421643A (en) Method of cooling liquid
JPS5451372A (en) Sampler of scanning electron microscope of the like
JPS54125143A (en) Treating device using hydrogen fluoride-containing gas
JPS649624A (en) Method of drying semiconductor device
JPS5451370A (en) Carrier for producing frozen sample of charged-particle beam device
JPS5477357A (en) Container of very low temperature
JPS5276761A (en) Manufacturing method of heat pipe
JPS5238616A (en) Rotary compressor
JPH10104138A (ja) 冷却試料分析装置
GB586693A (en) Improvements in desiccation methods and apparatus
JPS53143014A (en) Rotary compressor
JPS5622960A (en) Preprocessor for sample
JPS541242A (en) Method of removing metal scale
JPS5486457A (en) Soldering apparatus
JPS57105223A (en) Sealing device for desorption zone in rotary cylinder type gas-treating device
JPS53105361A (en) Exhauster
JPS5587872A (en) Method of keeping pressure negative in reciprocating gas compressor
JPS5478998A (en) Superconduction unit
JPS52146778A (en) Recovery of solvent
JPS5662514A (en) Four line trap
JPS5222615A (en) Fuel supply process and supply device of rotary piston engine