JPS5451372A - Sampler of scanning electron microscope of the like - Google Patents
Sampler of scanning electron microscope of the likeInfo
- Publication number
- JPS5451372A JPS5451372A JP11673377A JP11673377A JPS5451372A JP S5451372 A JPS5451372 A JP S5451372A JP 11673377 A JP11673377 A JP 11673377A JP 11673377 A JP11673377 A JP 11673377A JP S5451372 A JPS5451372 A JP S5451372A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- cooling
- processing chamber
- chamber
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To improve the operation of the sample device of a scanning electron microscope, by composing the device of a sample coolig method, sample temperature controller, sample holder, and sample processing chamber.
CONSTITUTION: Sample processing chamber 2, provided being linked to samle chamber 1, is disconected vacuously by air lock valve 3 and also provided with cooling unit 4 in chamber 2. Unit 4 consists of cooling tank 5, cooling tank support 8, cooling-unit moving table 9, and sample temperature controller 10. Controller 10, on the other hand, consists of heater 12, lead wire 13, sample holder 11, thermocouple 14, lead-in terminal 15, heater power supply 16 and thermocouple meter 17. Between cooling-unit moving table 9 and the flank of the sample processing chamber confronting to it, vacuum-sealing 0 ring 22 is prvided which is easy to slide. Cap 24 is fitted to cooling tank 5 in order to prevent refrigerant 6 from overflowing. Sample 18, after dipped in liquid nitrogen and frozen, is mounted on cooling body 7 together with holder 11
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11673377A JPS5855616B2 (en) | 1977-09-30 | 1977-09-30 | Sample equipment such as scanning electron microscopes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11673377A JPS5855616B2 (en) | 1977-09-30 | 1977-09-30 | Sample equipment such as scanning electron microscopes |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5451372A true JPS5451372A (en) | 1979-04-23 |
JPS5855616B2 JPS5855616B2 (en) | 1983-12-10 |
Family
ID=14694431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11673377A Expired JPS5855616B2 (en) | 1977-09-30 | 1977-09-30 | Sample equipment such as scanning electron microscopes |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5855616B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58182255U (en) * | 1982-05-28 | 1983-12-05 | 日本電子株式会社 | Sample contamination prevention device |
CN103558232A (en) * | 2013-10-16 | 2014-02-05 | 中国科学院物理研究所 | In-situ varying temperature spectral measurement device in transmission electron microscope |
KR20150061207A (en) * | 2013-11-27 | 2015-06-04 | 현대제철 주식회사 | Sample holder device having fuction of controlling temperature, sample thermal annealing and surface analyzing apparatus using the same |
JP2018129163A (en) * | 2017-02-08 | 2018-08-16 | 日本電子株式会社 | Sample moving device and electron microscope |
-
1977
- 1977-09-30 JP JP11673377A patent/JPS5855616B2/en not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58182255U (en) * | 1982-05-28 | 1983-12-05 | 日本電子株式会社 | Sample contamination prevention device |
JPS6326924Y2 (en) * | 1982-05-28 | 1988-07-21 | ||
CN103558232A (en) * | 2013-10-16 | 2014-02-05 | 中国科学院物理研究所 | In-situ varying temperature spectral measurement device in transmission electron microscope |
CN103558232B (en) * | 2013-10-16 | 2015-10-28 | 中国科学院物理研究所 | A kind of device in transmission electron microscope situ alternating temperature measure spectrum |
KR20150061207A (en) * | 2013-11-27 | 2015-06-04 | 현대제철 주식회사 | Sample holder device having fuction of controlling temperature, sample thermal annealing and surface analyzing apparatus using the same |
JP2018129163A (en) * | 2017-02-08 | 2018-08-16 | 日本電子株式会社 | Sample moving device and electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JPS5855616B2 (en) | 1983-12-10 |
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