JPS544079A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS544079A JPS544079A JP6850177A JP6850177A JPS544079A JP S544079 A JPS544079 A JP S544079A JP 6850177 A JP6850177 A JP 6850177A JP 6850177 A JP6850177 A JP 6850177A JP S544079 A JPS544079 A JP S544079A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- junction surface
- intersect
- drain
- decrease
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE:To prevent the decrease in dielectric strength between the source and the drain, by forming a V-shaped groove so that it intersect the junction surface orthogonally with the curved part on the PN junction surface of double diffusion region.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52068501A JPS6040717B2 (en) | 1977-06-10 | 1977-06-10 | semiconductor equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52068501A JPS6040717B2 (en) | 1977-06-10 | 1977-06-10 | semiconductor equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS544079A true JPS544079A (en) | 1979-01-12 |
JPS6040717B2 JPS6040717B2 (en) | 1985-09-12 |
Family
ID=13375502
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52068501A Expired JPS6040717B2 (en) | 1977-06-10 | 1977-06-10 | semiconductor equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6040717B2 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5662365A (en) * | 1979-10-26 | 1981-05-28 | Nippon Telegr & Teleph Corp <Ntt> | High voltage-proof mos field effect transistor |
JPS5718365A (en) * | 1980-07-08 | 1982-01-30 | Matsushita Electronics Corp | Semiconductor device and manufacture thereof |
JPS5832464A (en) * | 1981-08-20 | 1983-02-25 | Nec Corp | Vertical type tetrode mosfet |
JPS5868044U (en) * | 1981-10-30 | 1983-05-09 | 日産自動車株式会社 | MOS semiconductor device |
US4550332A (en) * | 1980-10-30 | 1985-10-29 | Veb Zentrum Fur Forschung Und Technologie Mikroelektronik | Gate controlled semiconductor device |
US4851889A (en) * | 1986-12-03 | 1989-07-25 | Fuji Electric Co., Ltd. | Insulated gate field effect transistor with vertical channel |
US4954854A (en) * | 1989-05-22 | 1990-09-04 | International Business Machines Corporation | Cross-point lightly-doped drain-source trench transistor and fabrication process therefor |
JP2000332246A (en) * | 1999-05-10 | 2000-11-30 | Intersil Corp | Process of forming mos gate device having self-aligned trench |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140114U (en) * | 1986-02-26 | 1987-09-04 |
-
1977
- 1977-06-10 JP JP52068501A patent/JPS6040717B2/en not_active Expired
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5662365A (en) * | 1979-10-26 | 1981-05-28 | Nippon Telegr & Teleph Corp <Ntt> | High voltage-proof mos field effect transistor |
JPS5718365A (en) * | 1980-07-08 | 1982-01-30 | Matsushita Electronics Corp | Semiconductor device and manufacture thereof |
JPH0216022B2 (en) * | 1980-07-08 | 1990-04-13 | Matsushita Electronics Corp | |
US4550332A (en) * | 1980-10-30 | 1985-10-29 | Veb Zentrum Fur Forschung Und Technologie Mikroelektronik | Gate controlled semiconductor device |
JPS5832464A (en) * | 1981-08-20 | 1983-02-25 | Nec Corp | Vertical type tetrode mosfet |
JPS5868044U (en) * | 1981-10-30 | 1983-05-09 | 日産自動車株式会社 | MOS semiconductor device |
US4851889A (en) * | 1986-12-03 | 1989-07-25 | Fuji Electric Co., Ltd. | Insulated gate field effect transistor with vertical channel |
US4954854A (en) * | 1989-05-22 | 1990-09-04 | International Business Machines Corporation | Cross-point lightly-doped drain-source trench transistor and fabrication process therefor |
JP2000332246A (en) * | 1999-05-10 | 2000-11-30 | Intersil Corp | Process of forming mos gate device having self-aligned trench |
Also Published As
Publication number | Publication date |
---|---|
JPS6040717B2 (en) | 1985-09-12 |
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