JPS5431736A - Production of emulsion photo masks - Google Patents

Production of emulsion photo masks

Info

Publication number
JPS5431736A
JPS5431736A JP9796477A JP9796477A JPS5431736A JP S5431736 A JPS5431736 A JP S5431736A JP 9796477 A JP9796477 A JP 9796477A JP 9796477 A JP9796477 A JP 9796477A JP S5431736 A JPS5431736 A JP S5431736A
Authority
JP
Japan
Prior art keywords
production
photo masks
emulsion
emulsion photo
undergone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9796477A
Other languages
Japanese (ja)
Inventor
Akira Morishige
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9796477A priority Critical patent/JPS5431736A/en
Publication of JPS5431736A publication Critical patent/JPS5431736A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE:To readily produce postive masks of high resolution permitting high integration by baking the dry plate, which has undergone developing and exposure, under specific conditions then bleaching the same thereby readily inverting the balck and w white of the emulsion photo mask having undergone normal treatment.
JP9796477A 1977-08-16 1977-08-16 Production of emulsion photo masks Pending JPS5431736A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9796477A JPS5431736A (en) 1977-08-16 1977-08-16 Production of emulsion photo masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9796477A JPS5431736A (en) 1977-08-16 1977-08-16 Production of emulsion photo masks

Publications (1)

Publication Number Publication Date
JPS5431736A true JPS5431736A (en) 1979-03-08

Family

ID=14206345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9796477A Pending JPS5431736A (en) 1977-08-16 1977-08-16 Production of emulsion photo masks

Country Status (1)

Country Link
JP (1) JPS5431736A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9513551B2 (en) 2009-01-29 2016-12-06 Digiflex Ltd. Process for producing a photomask on a photopolymeric surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9513551B2 (en) 2009-01-29 2016-12-06 Digiflex Ltd. Process for producing a photomask on a photopolymeric surface

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