JPS53128278A - Production of lsi mask - Google Patents

Production of lsi mask

Info

Publication number
JPS53128278A
JPS53128278A JP4200877A JP4200877A JPS53128278A JP S53128278 A JPS53128278 A JP S53128278A JP 4200877 A JP4200877 A JP 4200877A JP 4200877 A JP4200877 A JP 4200877A JP S53128278 A JPS53128278 A JP S53128278A
Authority
JP
Japan
Prior art keywords
production
mask
lsi mask
lsi
faces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4200877A
Other languages
Japanese (ja)
Inventor
Hiroshi Otsuka
Hideo Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP4200877A priority Critical patent/JPS53128278A/en
Publication of JPS53128278A publication Critical patent/JPS53128278A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To eliminate the need for covering faces other than a chip face and reduce mask negative production processes at the time of exposing the mask negative by utilizing all the faces, other than the chip face, of a dry plate for forming an LSI mask.
COPYRIGHT: (C)1978,JPO&Japio
JP4200877A 1977-04-14 1977-04-14 Production of lsi mask Pending JPS53128278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4200877A JPS53128278A (en) 1977-04-14 1977-04-14 Production of lsi mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4200877A JPS53128278A (en) 1977-04-14 1977-04-14 Production of lsi mask

Publications (1)

Publication Number Publication Date
JPS53128278A true JPS53128278A (en) 1978-11-09

Family

ID=12624144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4200877A Pending JPS53128278A (en) 1977-04-14 1977-04-14 Production of lsi mask

Country Status (1)

Country Link
JP (1) JPS53128278A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244740A (en) * 1985-08-23 1987-02-26 Hoya Corp Formation of pattern
JPS6247642A (en) * 1985-08-27 1987-03-02 Hoya Corp Pattern forming method
JPS62179748U (en) * 1987-04-23 1987-11-14
JPS63200152A (en) * 1987-02-17 1988-08-18 Matsushita Electronics Corp Mask for producing semiconductor
JPH04177348A (en) * 1990-11-13 1992-06-24 Nec Yamaguchi Ltd Reticule for reduction projection aligner

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244740A (en) * 1985-08-23 1987-02-26 Hoya Corp Formation of pattern
JPH0355815B2 (en) * 1985-08-23 1991-08-26
JPS6247642A (en) * 1985-08-27 1987-03-02 Hoya Corp Pattern forming method
JPS63200152A (en) * 1987-02-17 1988-08-18 Matsushita Electronics Corp Mask for producing semiconductor
JPS62179748U (en) * 1987-04-23 1987-11-14
JPS638900Y2 (en) * 1987-04-23 1988-03-16
JPH04177348A (en) * 1990-11-13 1992-06-24 Nec Yamaguchi Ltd Reticule for reduction projection aligner

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