JPS5428782A - Continuous physical vapor depositing device - Google Patents

Continuous physical vapor depositing device

Info

Publication number
JPS5428782A
JPS5428782A JP9525877A JP9525877A JPS5428782A JP S5428782 A JPS5428782 A JP S5428782A JP 9525877 A JP9525877 A JP 9525877A JP 9525877 A JP9525877 A JP 9525877A JP S5428782 A JPS5428782 A JP S5428782A
Authority
JP
Japan
Prior art keywords
physical vapor
depositing device
vapor depositing
continuous physical
vapor deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9525877A
Other languages
Japanese (ja)
Other versions
JPS5931590B2 (en
Inventor
Satoshi Yoshida
Hideaki Takeuchi
Tomoaki Ikeda
Sho Nakao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP9525877A priority Critical patent/JPS5931590B2/en
Priority to DE19782834910 priority patent/DE2834910A1/en
Publication of JPS5428782A publication Critical patent/JPS5428782A/en
Publication of JPS5931590B2 publication Critical patent/JPS5931590B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To provide the subject device wherein a buffer layer is provided around the periphery of a guide roll with which the surface of a vapor deposited layer is in contact, whereby a vapor deposited layer almost free of such defects as pinholes and scratches can be produced.
COPYRIGHT: (C)1979,JPO&Japio
JP9525877A 1977-08-09 1977-08-09 Continuous physical vapor deposition equipment Expired JPS5931590B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9525877A JPS5931590B2 (en) 1977-08-09 1977-08-09 Continuous physical vapor deposition equipment
DE19782834910 DE2834910A1 (en) 1977-08-09 1978-08-09 Vacuum depositing metal on plastic film - by passing film through cloud of vaporised metal and over cushioned rollers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9525877A JPS5931590B2 (en) 1977-08-09 1977-08-09 Continuous physical vapor deposition equipment

Publications (2)

Publication Number Publication Date
JPS5428782A true JPS5428782A (en) 1979-03-03
JPS5931590B2 JPS5931590B2 (en) 1984-08-02

Family

ID=14132728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9525877A Expired JPS5931590B2 (en) 1977-08-09 1977-08-09 Continuous physical vapor deposition equipment

Country Status (2)

Country Link
JP (1) JPS5931590B2 (en)
DE (1) DE2834910A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0082001A1 (en) * 1981-12-16 1983-06-22 General Engineering Radcliffe 1979 Limited Apparatus for and a method of metallising a length of material
JPH02232359A (en) * 1989-03-06 1990-09-14 Roll Tec:Kk Electrode roller
JP2020204069A (en) * 2019-06-17 2020-12-24 株式会社アルバック Winding type film deposition apparatus and method for controlling the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201323013D0 (en) * 2013-12-24 2014-02-12 Bobst Manchester Ltd Methods of operating a vacuum coater,metal/metal oxide coated polymeric webs and vacuum coaters

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0082001A1 (en) * 1981-12-16 1983-06-22 General Engineering Radcliffe 1979 Limited Apparatus for and a method of metallising a length of material
JPH02232359A (en) * 1989-03-06 1990-09-14 Roll Tec:Kk Electrode roller
JP2020204069A (en) * 2019-06-17 2020-12-24 株式会社アルバック Winding type film deposition apparatus and method for controlling the same

Also Published As

Publication number Publication date
DE2834910A1 (en) 1979-02-22
JPS5931590B2 (en) 1984-08-02

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