JPS5425673A - Method of projecting charged particle beam - Google Patents
Method of projecting charged particle beamInfo
- Publication number
- JPS5425673A JPS5425673A JP9107677A JP9107677A JPS5425673A JP S5425673 A JPS5425673 A JP S5425673A JP 9107677 A JP9107677 A JP 9107677A JP 9107677 A JP9107677 A JP 9107677A JP S5425673 A JPS5425673 A JP S5425673A
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- projecting charged
- projecting
- particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9107677A JPS5425673A (en) | 1977-07-29 | 1977-07-29 | Method of projecting charged particle beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9107677A JPS5425673A (en) | 1977-07-29 | 1977-07-29 | Method of projecting charged particle beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5425673A true JPS5425673A (en) | 1979-02-26 |
JPS5416714B2 JPS5416714B2 (en) | 1979-06-25 |
Family
ID=14016406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9107677A Granted JPS5425673A (en) | 1977-07-29 | 1977-07-29 | Method of projecting charged particle beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5425673A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694740A (en) * | 1979-12-28 | 1981-07-31 | Fujitsu Ltd | Electronic beam exposure device |
JPS62133715A (en) * | 1985-12-06 | 1987-06-16 | Toshiba Corp | Charged beam lithography equipment |
JPH0350820A (en) * | 1989-07-19 | 1991-03-05 | Nec Corp | Charged beam exposing method |
-
1977
- 1977-07-29 JP JP9107677A patent/JPS5425673A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5694740A (en) * | 1979-12-28 | 1981-07-31 | Fujitsu Ltd | Electronic beam exposure device |
JPS62133715A (en) * | 1985-12-06 | 1987-06-16 | Toshiba Corp | Charged beam lithography equipment |
JPH0350820A (en) * | 1989-07-19 | 1991-03-05 | Nec Corp | Charged beam exposing method |
Also Published As
Publication number | Publication date |
---|---|
JPS5416714B2 (en) | 1979-06-25 |
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