JPS5410679A - Method of and device for projecting charged particle beam - Google Patents

Method of and device for projecting charged particle beam

Info

Publication number
JPS5410679A
JPS5410679A JP7576077A JP7576077A JPS5410679A JP S5410679 A JPS5410679 A JP S5410679A JP 7576077 A JP7576077 A JP 7576077A JP 7576077 A JP7576077 A JP 7576077A JP S5410679 A JPS5410679 A JP S5410679A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
projecting charged
projecting
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7576077A
Other languages
Japanese (ja)
Other versions
JPS5416712B2 (en
Inventor
Hidekazu Gotou
Masanori Idesawa
Tateaki Sasaki
Takashi Souma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP7576077A priority Critical patent/JPS5410679A/en
Priority to GB22798/78A priority patent/GB1605087A/en
Priority to US05/909,217 priority patent/US4182958A/en
Priority to FR7816064A priority patent/FR2393418B1/en
Priority to DE2823829A priority patent/DE2823829C2/en
Publication of JPS5410679A publication Critical patent/JPS5410679A/en
Publication of JPS5416712B2 publication Critical patent/JPS5416712B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP7576077A 1977-05-31 1977-06-25 Method of and device for projecting charged particle beam Granted JPS5410679A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP7576077A JPS5410679A (en) 1977-06-25 1977-06-25 Method of and device for projecting charged particle beam
GB22798/78A GB1605087A (en) 1977-05-31 1978-05-25 Method for shaping a beam of electrically charged particles
US05/909,217 US4182958A (en) 1977-05-31 1978-05-25 Method and apparatus for projecting a beam of electrically charged particles
FR7816064A FR2393418B1 (en) 1977-05-31 1978-05-30 METHOD AND APPARATUS FOR PROJECTING AN ELECTRICIZED PARTICLE BEAM ON A TARGET
DE2823829A DE2823829C2 (en) 1977-05-31 1978-05-31 Method and device for changing the beam cross-section of a beam of electrically charged particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7576077A JPS5410679A (en) 1977-06-25 1977-06-25 Method of and device for projecting charged particle beam

Publications (2)

Publication Number Publication Date
JPS5410679A true JPS5410679A (en) 1979-01-26
JPS5416712B2 JPS5416712B2 (en) 1979-06-25

Family

ID=13585497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7576077A Granted JPS5410679A (en) 1977-05-31 1977-06-25 Method of and device for projecting charged particle beam

Country Status (1)

Country Link
JP (1) JPS5410679A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752133A (en) * 1980-09-16 1982-03-27 Toshiba Corp Electron beam exposure apparatus
JPS5762000A (en) * 1980-10-01 1982-04-14 Hitachi Ltd Optical device for shaping charged particle beam

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752133A (en) * 1980-09-16 1982-03-27 Toshiba Corp Electron beam exposure apparatus
JPS622454B2 (en) * 1980-09-16 1987-01-20 Tokyo Shibaura Electric Co
JPS5762000A (en) * 1980-10-01 1982-04-14 Hitachi Ltd Optical device for shaping charged particle beam
JPS6259458B2 (en) * 1980-10-01 1987-12-11 Hitachi Seisakusho Kk

Also Published As

Publication number Publication date
JPS5416712B2 (en) 1979-06-25

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