JPS542300A - Methdo and apparatus for vapor phase growth of magnespinel - Google Patents
Methdo and apparatus for vapor phase growth of magnespinelInfo
- Publication number
- JPS542300A JPS542300A JP6725277A JP6725277A JPS542300A JP S542300 A JPS542300 A JP S542300A JP 6725277 A JP6725277 A JP 6725277A JP 6725277 A JP6725277 A JP 6725277A JP S542300 A JPS542300 A JP S542300A
- Authority
- JP
- Japan
- Prior art keywords
- magnespinel
- vapor phase
- phase growth
- methdo
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To carry out vapor phase growth of magnespinel shown by nMgO,Al2O3, by bringing a mixed gas of a reaction product gas of liquid or solid Al and HCl gas, a reaction product gas of solid Mg and HCl gas, and CO2 into contact with single crystal substrates.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52067252A JPS5855119B2 (en) | 1977-06-09 | 1977-06-09 | Vapor phase growth method and equipment for magnesia spinel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52067252A JPS5855119B2 (en) | 1977-06-09 | 1977-06-09 | Vapor phase growth method and equipment for magnesia spinel |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS542300A true JPS542300A (en) | 1979-01-09 |
JPS5855119B2 JPS5855119B2 (en) | 1983-12-08 |
Family
ID=13339543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52067252A Expired JPS5855119B2 (en) | 1977-06-09 | 1977-06-09 | Vapor phase growth method and equipment for magnesia spinel |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5855119B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55135996A (en) * | 1979-04-12 | 1980-10-23 | Okura Denki Co Ltd | Signal processing circuit |
JPS56146251A (en) * | 1980-04-14 | 1981-11-13 | Fujitsu Ltd | Semiconductor device and manufacture therefor |
JPS56146249A (en) * | 1980-04-14 | 1981-11-13 | Fujitsu Ltd | Semiconductor device |
US4300979A (en) * | 1980-11-03 | 1981-11-17 | Bell Telephone Laboratories, Incorporated | Growth of AlPO4 crystals |
JPS5766120A (en) * | 1980-10-13 | 1982-04-22 | Teijin Ltd | Preparation of pulplike particle |
US4507169A (en) * | 1981-06-29 | 1985-03-26 | Fujitsu Limited | Method and apparatus for vapor phase growth of a semiconductor |
-
1977
- 1977-06-09 JP JP52067252A patent/JPS5855119B2/en not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55135996A (en) * | 1979-04-12 | 1980-10-23 | Okura Denki Co Ltd | Signal processing circuit |
JPS56146251A (en) * | 1980-04-14 | 1981-11-13 | Fujitsu Ltd | Semiconductor device and manufacture therefor |
JPS56146249A (en) * | 1980-04-14 | 1981-11-13 | Fujitsu Ltd | Semiconductor device |
JPS5766120A (en) * | 1980-10-13 | 1982-04-22 | Teijin Ltd | Preparation of pulplike particle |
US4300979A (en) * | 1980-11-03 | 1981-11-17 | Bell Telephone Laboratories, Incorporated | Growth of AlPO4 crystals |
US4507169A (en) * | 1981-06-29 | 1985-03-26 | Fujitsu Limited | Method and apparatus for vapor phase growth of a semiconductor |
Also Published As
Publication number | Publication date |
---|---|
JPS5855119B2 (en) | 1983-12-08 |
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