JPS5421184A - Manufacture for light emitting element - Google Patents

Manufacture for light emitting element

Info

Publication number
JPS5421184A
JPS5421184A JP8651477A JP8651477A JPS5421184A JP S5421184 A JPS5421184 A JP S5421184A JP 8651477 A JP8651477 A JP 8651477A JP 8651477 A JP8651477 A JP 8651477A JP S5421184 A JPS5421184 A JP S5421184A
Authority
JP
Japan
Prior art keywords
light emitting
manufacture
emitting element
etching
eprotective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8651477A
Other languages
Japanese (ja)
Other versions
JPS5952552B2 (en
Inventor
Tsutomu Koshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP52086514A priority Critical patent/JPS5952552B2/en
Publication of JPS5421184A publication Critical patent/JPS5421184A/en
Publication of JPS5952552B2 publication Critical patent/JPS5952552B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the manufacturing man-hours for light emitting elements, by making unnecessary th eprotective film at etching, preventing the contamination on the element surface, and reducing the etching processes.
COPYRIGHT: (C)1979,JPO&Japio
JP52086514A 1977-07-18 1977-07-18 Manufacturing method of light emitting device Expired JPS5952552B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52086514A JPS5952552B2 (en) 1977-07-18 1977-07-18 Manufacturing method of light emitting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52086514A JPS5952552B2 (en) 1977-07-18 1977-07-18 Manufacturing method of light emitting device

Publications (2)

Publication Number Publication Date
JPS5421184A true JPS5421184A (en) 1979-02-17
JPS5952552B2 JPS5952552B2 (en) 1984-12-20

Family

ID=13889085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52086514A Expired JPS5952552B2 (en) 1977-07-18 1977-07-18 Manufacturing method of light emitting device

Country Status (1)

Country Link
JP (1) JPS5952552B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102638109B1 (en) * 2022-12-09 2024-02-21 주식회사 아텍스에너지 Foot plate assembly for a roof

Also Published As

Publication number Publication date
JPS5952552B2 (en) 1984-12-20

Similar Documents

Publication Publication Date Title
JPS5351970A (en) Manufacture for semiconductor substrate
JPS53108390A (en) Semiconductor device and its manufacture
JPS52144218A (en) Solid pickup element
JPS5421184A (en) Manufacture for light emitting element
JPS542060A (en) Semiconductor wafer
JPS5313423A (en) Photosensitive element of selenium for electronic photography
JPS53125761A (en) Manufacture for binary compound semiconductor thin film
JPS5421273A (en) Manufacture for photo mask
JPS5360177A (en) Photo mask
JPS5346222A (en) Solid state pick up unit
JPS531471A (en) Manufacture for semiconductor device
JPS51111075A (en) Photo etching photo mask
JPS5421272A (en) Metal photo mask
JPS5382173A (en) Positioning method
JPS52153669A (en) Photo mask of semiconductor integrated circuit
JPS5399772A (en) Optical mask
JPS5421173A (en) Manufacture for semiconductor having oxide film
JPS52134387A (en) Semiconductor laser device
JPS52125277A (en) Optical mask
JPS5379387A (en) Optical mask
JPS53118993A (en) Manufacture for semiconductor device
JPS547941A (en) Production of optical diffusive plate
JPS5428580A (en) Manufacture of semiconductor device
JPS5395586A (en) Manufacture for semiconductor element
JPS5427373A (en) Manufacture of emulsion photo mask