JPS54154814A - Cooling trap - Google Patents
Cooling trapInfo
- Publication number
- JPS54154814A JPS54154814A JP6407478A JP6407478A JPS54154814A JP S54154814 A JPS54154814 A JP S54154814A JP 6407478 A JP6407478 A JP 6407478A JP 6407478 A JP6407478 A JP 6407478A JP S54154814 A JPS54154814 A JP S54154814A
- Authority
- JP
- Japan
- Prior art keywords
- chevrons
- condensed
- low temperature
- extremely low
- oil vapour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
PURPOSE: For eliminating the trouble of additionally supplying liquid nitrogen, simplifying constructon and efficiently obtaining freezing output, to use an extremely low temperature freezer which uses helium gas and whose cold head and chevrons are combined into a single structure.
CONSTITUTION: The working liquid in a working liquid tank 2 is evaporated by a heater. Thus-obtained oil vapour is jetted out through a chimney 8 and a nozzle 9 to join the gas on high vacuum chamber 10 and 35 side. Thus-obtained mixture returns to said working tank 2 along the inner face of a case 8 while condensed. At this time, the chevrons 26 provided at the upper stage of the extremely low temperature freezer 21 using helium gas condenses the oil vapour returning from the gas discharge side space in said case 3 through the large through hole 42 of a partition plate 40. Further, the CO2 having condensed on the underside of the chevrons 27 provided at the lower stage of said extremely low temperature freezer 21 falls down while contained in the condensed oil vapour on gas discharge side. Thereby, clean high vacuum can constantly be obtained without any obstruction of CO2.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6407478A JPS54154814A (en) | 1978-05-29 | 1978-05-29 | Cooling trap |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6407478A JPS54154814A (en) | 1978-05-29 | 1978-05-29 | Cooling trap |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54154814A true JPS54154814A (en) | 1979-12-06 |
Family
ID=13247566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6407478A Pending JPS54154814A (en) | 1978-05-29 | 1978-05-29 | Cooling trap |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54154814A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10861681B2 (en) * | 2017-05-19 | 2020-12-08 | Applied Materials, Inc. | Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent |
-
1978
- 1978-05-29 JP JP6407478A patent/JPS54154814A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10861681B2 (en) * | 2017-05-19 | 2020-12-08 | Applied Materials, Inc. | Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent |
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