JPS5414175A - Short channel length fet and method of producing same - Google Patents
Short channel length fet and method of producing sameInfo
- Publication number
- JPS5414175A JPS5414175A JP8046178A JP8046178A JPS5414175A JP S5414175 A JPS5414175 A JP S5414175A JP 8046178 A JP8046178 A JP 8046178A JP 8046178 A JP8046178 A JP 8046178A JP S5414175 A JPS5414175 A JP S5414175A
- Authority
- JP
- Japan
- Prior art keywords
- channel length
- short channel
- producing same
- length fet
- fet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66484—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with multiple gate, at least one gate being an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7831—Field effect transistors with field effect produced by an insulated gate with multiple gate structure
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19772729658 DE2729658A1 (en) | 1977-06-30 | 1977-06-30 | FIELD EFFECT TRANSISTOR WITH EXTREMELY SHORT CHANNEL LENGTH |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5414175A true JPS5414175A (en) | 1979-02-02 |
Family
ID=6012852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8046178A Pending JPS5414175A (en) | 1977-06-30 | 1978-06-30 | Short channel length fet and method of producing same |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5414175A (en) |
DE (1) | DE2729658A1 (en) |
FR (1) | FR2396416A1 (en) |
GB (1) | GB1586423A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4319263A (en) * | 1978-05-18 | 1982-03-09 | Texas Instruments Incorporated | Double level polysilicon series transistor devices |
JPS57204172A (en) * | 1981-06-08 | 1982-12-14 | Ibm | Field effect transistor |
US4587709A (en) * | 1983-06-06 | 1986-05-13 | International Business Machines Corporation | Method of making short channel IGFET |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3355598A (en) * | 1964-11-25 | 1967-11-28 | Rca Corp | Integrated logic arrays employing insulated-gate field-effect devices having a common source region and shared gates |
GB1139170A (en) * | 1965-12-22 | 1969-01-08 | Mullard Ltd | Thin film transistors |
FR1511783A (en) * | 1966-04-15 | 1968-02-02 | Philco Ford Corp | Metal-insulator-semiconductor transistor, comprising multiple control electrodes |
-
1977
- 1977-06-30 DE DE19772729658 patent/DE2729658A1/en not_active Ceased
-
1978
- 1978-05-15 GB GB19497/78A patent/GB1586423A/en not_active Expired
- 1978-06-26 FR FR7819007A patent/FR2396416A1/en active Granted
- 1978-06-30 JP JP8046178A patent/JPS5414175A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2396416A1 (en) | 1979-01-26 |
GB1586423A (en) | 1981-03-18 |
FR2396416B1 (en) | 1982-12-17 |
DE2729658A1 (en) | 1979-01-11 |
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