JPS54122970A - Objective lens for scanning electronic microscope or the like - Google Patents
Objective lens for scanning electronic microscope or the likeInfo
- Publication number
- JPS54122970A JPS54122970A JP3014178A JP3014178A JPS54122970A JP S54122970 A JPS54122970 A JP S54122970A JP 3014178 A JP3014178 A JP 3014178A JP 3014178 A JP3014178 A JP 3014178A JP S54122970 A JPS54122970 A JP S54122970A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- auxiliary
- distribution
- magnetic field
- remarkably
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To remarkably reduce aberration, by providing the coil producing the magnetic field of rotational symmetry to the light axis, at the center or inside of the auxiliary gap.
CONSTITUTION: When power is fed to the coil 6, magnetomotive force is produced, and it is distributed to the main and auxiliary gaps 4, 5 depending on the gaps S, S'. S'/S is less than 2/3. The auxiliary coil 7 produces the magnetic field of rotational symmetry to the light axis. The coil 8 is used for deflection. The magnetic field distribution a in the main gap 4 having half value d1 and that b of the auxiliary gap 5 are synthesized, and the resultant distribution c is extended to the half value d2. Further, the magnetic field distribution d of the auxiliary coil 7 is synthesized causing the distribution e and the half value d3 can remarkably be increased. When adjusting the exciting current to the coil 7 and changing the distribution d, d3 can arbitrarily be selected. With this method, the spherical aberration and astigmatism can remarkably be decreased with slight increase in the magnetomotive force.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3014178A JPS5845782B2 (en) | 1978-03-16 | 1978-03-16 | Objective lenses for scanning electron microscopes, etc. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3014178A JPS5845782B2 (en) | 1978-03-16 | 1978-03-16 | Objective lenses for scanning electron microscopes, etc. |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54122970A true JPS54122970A (en) | 1979-09-22 |
JPS5845782B2 JPS5845782B2 (en) | 1983-10-12 |
Family
ID=12295482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3014178A Expired JPS5845782B2 (en) | 1978-03-16 | 1978-03-16 | Objective lenses for scanning electron microscopes, etc. |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5845782B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5994350A (en) * | 1982-11-19 | 1984-05-31 | Akashi Seisakusho Co Ltd | Electromagnetic objective lens |
JPS5996758U (en) * | 1982-12-20 | 1984-06-30 | 株式会社明石製作所 | Electromagnetic objective lens |
JPH02216745A (en) * | 1989-02-16 | 1990-08-29 | Shimadzu Corp | Electronic optical system to get false parallel microdiameter electron beam |
WO2006088159A1 (en) * | 2005-02-21 | 2006-08-24 | National University Corporation Kyoto Institute Of Technology | Electron microscope and composite irradiation lens |
-
1978
- 1978-03-16 JP JP3014178A patent/JPS5845782B2/en not_active Expired
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5994350A (en) * | 1982-11-19 | 1984-05-31 | Akashi Seisakusho Co Ltd | Electromagnetic objective lens |
JPS5996758U (en) * | 1982-12-20 | 1984-06-30 | 株式会社明石製作所 | Electromagnetic objective lens |
JPH02216745A (en) * | 1989-02-16 | 1990-08-29 | Shimadzu Corp | Electronic optical system to get false parallel microdiameter electron beam |
WO2006088159A1 (en) * | 2005-02-21 | 2006-08-24 | National University Corporation Kyoto Institute Of Technology | Electron microscope and composite irradiation lens |
EP1852890A1 (en) * | 2005-02-21 | 2007-11-07 | National University Corporation Kyoto Institute of Technology | Electron microscope and composite irradiation lens |
US7601957B2 (en) | 2005-02-21 | 2009-10-13 | National University Corporation Kyoto Institute Of Technology | Electron microscope and combined illumination lens |
EP1852890A4 (en) * | 2005-02-21 | 2010-11-24 | Nat Univ Corp Kyoto Inst Tech | Electron microscope and composite irradiation lens |
JP4807592B2 (en) * | 2005-02-21 | 2011-11-02 | 国立大学法人京都工芸繊維大学 | Electron microscope and compound irradiation lens |
Also Published As
Publication number | Publication date |
---|---|
JPS5845782B2 (en) | 1983-10-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57118357A (en) | Objective lens for scan type electron microscope | |
JPS55156912A (en) | High variable power zoom lens including wide angle | |
JPS54122970A (en) | Objective lens for scanning electronic microscope or the like | |
JPS575256A (en) | Double focusing mass spectrograph | |
CA2006292A1 (en) | Very thin electrical steel strip having low core loss and high magnetic flux density and a process for producing the same | |
JPS5696447A (en) | Electron lens | |
JPS5434252A (en) | Microscope objective lens | |
JPS56107460A (en) | Electron lens | |
JPS642300A (en) | Electron storage ring | |
GB1191191A (en) | Improvements in Electron Microscopes | |
JPS52125347A (en) | Microscope objective lens | |
JPS5291361A (en) | Scanning electron microscope | |
JPS5280134A (en) | Low magnification object lens for microscope | |
JPS5767272A (en) | Electron lens | |
JPS5723454A (en) | Electron lens | |
JPS52128053A (en) | Electron microscope | |
JPS55121257A (en) | Electron lens | |
JPS5517261A (en) | Dc-electric machine | |
JPS5326615A (en) | Manufacture of deflection coi l | |
SU616322A1 (en) | Powder material for magnetic recording of information and method of manufacturing same | |
JPS5267953A (en) | Electronic lens | |
JPS5546424A (en) | Electron lens | |
JPS5599707A (en) | Inductor | |
JPS5613706A (en) | High-uniformity magnet device | |
JPS55159554A (en) | Electron lens |