JPS54121971A - Continuous exposure apparatus for longgsized flexible substrate - Google Patents

Continuous exposure apparatus for longgsized flexible substrate

Info

Publication number
JPS54121971A
JPS54121971A JP2939778A JP2939778A JPS54121971A JP S54121971 A JPS54121971 A JP S54121971A JP 2939778 A JP2939778 A JP 2939778A JP 2939778 A JP2939778 A JP 2939778A JP S54121971 A JPS54121971 A JP S54121971A
Authority
JP
Japan
Prior art keywords
longgsized
exposure apparatus
flexible substrate
continuous exposure
continuous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2939778A
Other languages
Japanese (ja)
Inventor
Masakazu Fujitani
Kazuhiko Yanagihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP2939778A priority Critical patent/JPS54121971A/en
Publication of JPS54121971A publication Critical patent/JPS54121971A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2939778A 1978-03-15 1978-03-15 Continuous exposure apparatus for longgsized flexible substrate Pending JPS54121971A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2939778A JPS54121971A (en) 1978-03-15 1978-03-15 Continuous exposure apparatus for longgsized flexible substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2939778A JPS54121971A (en) 1978-03-15 1978-03-15 Continuous exposure apparatus for longgsized flexible substrate

Publications (1)

Publication Number Publication Date
JPS54121971A true JPS54121971A (en) 1979-09-21

Family

ID=12274996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2939778A Pending JPS54121971A (en) 1978-03-15 1978-03-15 Continuous exposure apparatus for longgsized flexible substrate

Country Status (1)

Country Link
JP (1) JPS54121971A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0467654U (en) * 1990-10-24 1992-06-16
JP2007225884A (en) * 2006-02-23 2007-09-06 Mitsubishi Paper Mills Ltd Continuous exposure apparatus
US7947429B2 (en) 2006-08-03 2011-05-24 3M Innovative Properties Company Long length flexible circuits and method of making same
WO2013035489A1 (en) * 2011-09-06 2013-03-14 株式会社ニコン Substrate processing device
WO2013136834A1 (en) * 2012-03-15 2013-09-19 株式会社ニコン Mask unit, substrate processing device, method for producing mask unit, and substrate processing method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0467654U (en) * 1990-10-24 1992-06-16
JP2007225884A (en) * 2006-02-23 2007-09-06 Mitsubishi Paper Mills Ltd Continuous exposure apparatus
US7947429B2 (en) 2006-08-03 2011-05-24 3M Innovative Properties Company Long length flexible circuits and method of making same
WO2013035489A1 (en) * 2011-09-06 2013-03-14 株式会社ニコン Substrate processing device
JPWO2013035489A1 (en) * 2011-09-06 2015-03-23 株式会社ニコン Substrate processing equipment
WO2013136834A1 (en) * 2012-03-15 2013-09-19 株式会社ニコン Mask unit, substrate processing device, method for producing mask unit, and substrate processing method
JP2018077530A (en) * 2012-03-15 2018-05-17 株式会社ニコン Substrate treatment apparatus, and pattern formation method

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