JPS54111079A - Precise movement mechanism - Google Patents

Precise movement mechanism

Info

Publication number
JPS54111079A
JPS54111079A JP1767678A JP1767678A JPS54111079A JP S54111079 A JPS54111079 A JP S54111079A JP 1767678 A JP1767678 A JP 1767678A JP 1767678 A JP1767678 A JP 1767678A JP S54111079 A JPS54111079 A JP S54111079A
Authority
JP
Japan
Prior art keywords
permanent magnet
movement
magnet
micro
magnetic repulsion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1767678A
Other languages
Japanese (ja)
Inventor
Yasuo Nakagawa
Yukio Kenbou
Kou Makihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1767678A priority Critical patent/JPS54111079A/en
Publication of JPS54111079A publication Critical patent/JPS54111079A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To minimize the error of micro-movement caused by thermal deformation by separating in far distance from the driving source which is heating material. CONSTITUTION:Table 1 stops at the position where magnetic repulsion between No.1 permanent magnet 14b and No.2 permanent magnet 14a, and magnetic repulsion between No.4 permanent magnet 15b are balanced. Then, when the magnetic charges of No.1, No.2 premanent magnets 14b, 14a are allowed to be larger than the magnet charges of No.3 and No.4 permanent magnets 15a, 15b, the movement of table 1 becomes high precision micro-movement which is smaller than the movement of No.4 permanent magnet 15b. When No.4 permanent magnet 15b is moved a certain amount by actuating the driving motor of magnet feeding configuration 16, the table is micro-moved to the position where the magnetic repulsion is balanced.
JP1767678A 1978-02-20 1978-02-20 Precise movement mechanism Pending JPS54111079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1767678A JPS54111079A (en) 1978-02-20 1978-02-20 Precise movement mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1767678A JPS54111079A (en) 1978-02-20 1978-02-20 Precise movement mechanism

Publications (1)

Publication Number Publication Date
JPS54111079A true JPS54111079A (en) 1979-08-31

Family

ID=11950448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1767678A Pending JPS54111079A (en) 1978-02-20 1978-02-20 Precise movement mechanism

Country Status (1)

Country Link
JP (1) JPS54111079A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59124525A (en) * 1982-12-28 1984-07-18 Mitsubishi Electric Corp Pulse laser beam device
CN102541075A (en) * 2011-12-29 2012-07-04 大连理工大学 Foldable mechanism with multiple stable configurations

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59124525A (en) * 1982-12-28 1984-07-18 Mitsubishi Electric Corp Pulse laser beam device
CN102541075A (en) * 2011-12-29 2012-07-04 大连理工大学 Foldable mechanism with multiple stable configurations

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