JPS54104775A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS54104775A JPS54104775A JP1117778A JP1117778A JPS54104775A JP S54104775 A JPS54104775 A JP S54104775A JP 1117778 A JP1117778 A JP 1117778A JP 1117778 A JP1117778 A JP 1117778A JP S54104775 A JPS54104775 A JP S54104775A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- film
- particles
- manufacture
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To selectively remove glass particles, by washing the glass with surface active agent after attaching the glass with electrodeposition.
CONSTITUTION: The thermal oxidation film 2 on the Si substrate 1 is photo-etched, and the glass 3 is selectively made electrode-position. Next, cleaning is made by using water solution or solution of surface active agent, and the glass particles 4 on the film 2 are removed and dried. Thus, only the particles 4 on the film 4 can be removed and the deficiency of photoetching after the formation of glass film can be reduced.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53011177A JPS592373B2 (en) | 1978-02-03 | 1978-02-03 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53011177A JPS592373B2 (en) | 1978-02-03 | 1978-02-03 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54104775A true JPS54104775A (en) | 1979-08-17 |
JPS592373B2 JPS592373B2 (en) | 1984-01-18 |
Family
ID=11770767
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53011177A Expired JPS592373B2 (en) | 1978-02-03 | 1978-02-03 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS592373B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4976468A (en) * | 1972-11-13 | 1974-07-23 |
-
1978
- 1978-02-03 JP JP53011177A patent/JPS592373B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4976468A (en) * | 1972-11-13 | 1974-07-23 |
Also Published As
Publication number | Publication date |
---|---|
JPS592373B2 (en) | 1984-01-18 |
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