JPS54118168A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS54118168A
JPS54118168A JP2581578A JP2581578A JPS54118168A JP S54118168 A JPS54118168 A JP S54118168A JP 2581578 A JP2581578 A JP 2581578A JP 2581578 A JP2581578 A JP 2581578A JP S54118168 A JPS54118168 A JP S54118168A
Authority
JP
Japan
Prior art keywords
scribe line
platinum
coating
manufacture
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2581578A
Other languages
Japanese (ja)
Inventor
Masamitsu Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2581578A priority Critical patent/JPS54118168A/en
Publication of JPS54118168A publication Critical patent/JPS54118168A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To avoid formation of the platinum silicate on the scribe line by coating previously over the scribe line on the Si substrate with the photosensitive resin and then coating the platinum.
CONSTITUTION: Photosensitive resin 9 is formed selectively near the scribe line, and film 9 is lifted off after coating of platinum film 8. With this method, no platinum silicate layer is caused on the scribe line in the subsequent heat treatment.
COPYRIGHT: (C)1979,JPO&Japio
JP2581578A 1978-03-06 1978-03-06 Manufacture of semiconductor device Pending JPS54118168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2581578A JPS54118168A (en) 1978-03-06 1978-03-06 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2581578A JPS54118168A (en) 1978-03-06 1978-03-06 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS54118168A true JPS54118168A (en) 1979-09-13

Family

ID=12176353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2581578A Pending JPS54118168A (en) 1978-03-06 1978-03-06 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS54118168A (en)

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